Details
| Original language | English |
|---|---|
| Title of host publication | Optical Fabrication, Testing, and Metrology II |
| Subtitle of host publication | 13 - 15 September 2005, Jena, Germany |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| ISBN (print) | 0-8194-5983-6 |
| Publication status | Published - 19 Oct 2005 |
| Externally published | Yes |
| Event | Optical Fabrication, Testing, and Metrology II - Jena, Germany Duration: 13 Sept 2005 → 15 Sept 2005 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 5965 |
| ISSN (Print) | 0277-786X |
Abstract
For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS-measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.
Keywords
- Angle resolved scattering (ARS), Binary Gratings, ISO 13696, Scatter Characteristic
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Optical Fabrication, Testing, and Metrology II: 13 - 15 September 2005, Jena, Germany. Bellingham: SPIE, 2005. (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 5965).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Angle resolved scatter measurements on optical components
AU - Kadkhoda, Puja
AU - Mädebach, Heinrich
AU - Ristau, Detlev
PY - 2005/10/19
Y1 - 2005/10/19
N2 - For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS-measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.
AB - For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS-measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.
KW - Angle resolved scattering (ARS)
KW - Binary Gratings
KW - ISO 13696
KW - Scatter Characteristic
UR - http://www.scopus.com/inward/record.url?scp=33244485040&partnerID=8YFLogxK
U2 - 10.1117/12.625398
DO - 10.1117/12.625398
M3 - Conference contribution
AN - SCOPUS:33244485040
SN - 0-8194-5983-6
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Fabrication, Testing, and Metrology II
PB - SPIE
CY - Bellingham
T2 - Optical Fabrication, Testing, and Metrology II
Y2 - 13 September 2005 through 15 September 2005
ER -