An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Authors

  • Thomas Michael Winkel
  • Lohit Sagar Dutta
  • Hartmut Grabinski
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Details

Original languageEnglish
Title of host publication47th ARFTG Conference Digest - Spring 1996
Subtitle of host publicationHigh Power RF/Microwave Device Measurements, ARFTG 1996
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages102-111
Number of pages10
ISBN (electronic)0780356861, 9780780356863
Publication statusPublished - 1996
Event47th ARFTG Conference, ARFTG 1996 - San Francisco, United States
Duration: 20 Jun 199621 Jun 1996

Publication series

Name47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996

Abstract

Error networks that include contact structures and which embed devices under measurement (DUM) can often be partitioned into different line segments having constant line widths. The basic idea of the here proposed deembedding procedure is the calculation of the error network from a piece by piece characterization of the line segments. In the first step of the proposed deembedding method, the propagation constants and the characteristic impedances of the various line segments are calculated from high frequency S-parameter measurements. In the second step, the chain parameter matrix A seg of the different line segments are then calculated. The third step consists of the calculation of the chain parameter matrix A error of the complete error network. Finally, one can calculate the scattering chain parameter matrix T error from the related chain parameter matrix A' error of the complete error network. The main advantage of this method lies in the fact that only thru lines with different line lengths have to be measured. A further advantage of this deembedding procedure is that the error networks embedding different DUM's can contain line segments of arbitrary line lengths. Therefore, the proposed deembedding procedure can be used for DUM's that are embedded in error networks that consist of different line segments with constant line widths.

ASJC Scopus subject areas

Cite this

An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths. / Winkel, Thomas Michael; Dutta, Lohit Sagar; Grabinski, Hartmut.
47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996. Institute of Electrical and Electronics Engineers Inc., 1996. p. 102-111 4119842 (47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Winkel, TM, Dutta, LS & Grabinski, H 1996, An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths. in 47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996., 4119842, 47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996, Institute of Electrical and Electronics Engineers Inc., pp. 102-111, 47th ARFTG Conference, ARFTG 1996, San Francisco, California, United States, 20 Jun 1996. https://doi.org/10.1109/ARFTG.1996.327170
Winkel, T. M., Dutta, L. S., & Grabinski, H. (1996). An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths. In 47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996 (pp. 102-111). Article 4119842 (47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ARFTG.1996.327170
Winkel TM, Dutta LS, Grabinski H. An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths. In 47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996. Institute of Electrical and Electronics Engineers Inc. 1996. p. 102-111. 4119842. (47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996). doi: 10.1109/ARFTG.1996.327170
Winkel, Thomas Michael ; Dutta, Lohit Sagar ; Grabinski, Hartmut. / An on-wafer deembedding procedure for devices under measurement with error-networks containing arbitrary line lengths. 47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996. Institute of Electrical and Electronics Engineers Inc., 1996. pp. 102-111 (47th ARFTG Conference Digest - Spring 1996: High Power RF/Microwave Device Measurements, ARFTG 1996).
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