Details
Original language | English |
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Title of host publication | From Nano to Space |
Subtitle of host publication | Applied Mathematics Inspired by Roland Bulirsch |
Pages | 43-54 |
Number of pages | 12 |
Publication status | Published - 2008 |
Abstract
An improved photometric method for recording a 3D-microtopogrpahy of technical surfaces will be presented. The suggested procedure employs a scanning electron microscope (SEM) as multi-detector system. The improvement in measurement is based on an extended model of the electron detection in order to evaluate the detectors signals in a different way compared to known approaches. The method will be applied on a calibration sphere in order to demonstrate the accuracy of the current approach.
ASJC Scopus subject areas
- Mathematics(all)
- General Mathematics
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From Nano to Space: Applied Mathematics Inspired by Roland Bulirsch. 2008. p. 43-54.
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
}
TY - CHAP
T1 - An improved method to detect riblets on surfaces in nanometer scaling using SEM
AU - Reithmeier, E.
AU - Vynnyk, T.
PY - 2008
Y1 - 2008
N2 - An improved photometric method for recording a 3D-microtopogrpahy of technical surfaces will be presented. The suggested procedure employs a scanning electron microscope (SEM) as multi-detector system. The improvement in measurement is based on an extended model of the electron detection in order to evaluate the detectors signals in a different way compared to known approaches. The method will be applied on a calibration sphere in order to demonstrate the accuracy of the current approach.
AB - An improved photometric method for recording a 3D-microtopogrpahy of technical surfaces will be presented. The suggested procedure employs a scanning electron microscope (SEM) as multi-detector system. The improvement in measurement is based on an extended model of the electron detection in order to evaluate the detectors signals in a different way compared to known approaches. The method will be applied on a calibration sphere in order to demonstrate the accuracy of the current approach.
UR - http://www.scopus.com/inward/record.url?scp=84889972626&partnerID=8YFLogxK
U2 - 10.1007/978-3-540-74238-8_5
DO - 10.1007/978-3-540-74238-8_5
M3 - Contribution to book/anthology
AN - SCOPUS:84889972626
SN - 9783540742371
SP - 43
EP - 54
BT - From Nano to Space
ER -