Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016 |
| Editors | S. Shaposhnikov |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 32-36 |
| Number of pages | 5 |
| ISBN (electronic) | 9781509004454 |
| Publication status | Published - 5 Apr 2016 |
| Event | IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016 - Saint Petersburg, Russian Federation Duration: 2 Feb 2016 → 3 Feb 2016 |
Abstract
Many groups of engineers and researchers worldwide are involved in the application-oriented development of sensors. These efforts are often triggered by industrial applications and their extraordinary requirements in durability and reliability. Typical products are highly specialized sensors e.g. for temperature which are exposed to high physical and chemical stresses like in cutting or forming processes. One promising approach of space resolved or surface sensitive measurements is the use of thin film sensors. A key factor for the successful use is an insulating wear resistance layer on top of the sensor. In this report a well-known hard layer made from aluminum oxide was optimized under mechanical and electrical aspects.
Keywords
- aluminum oxide, deposition, electrical properties, mechanical properties, PVD, sputtering, thin films
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
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Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016. ed. / S. Shaposhnikov. Institute of Electrical and Electronics Engineers Inc., 2016. p. 32-36 7448110.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - An application report
T2 - IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016
AU - Dencker, Folke
AU - Wurz, Marc
AU - Dubrovskiy, Sergey
AU - Koroleva, Ekaterina
N1 - Publisher Copyright: © 2016 IEEE. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2016/4/5
Y1 - 2016/4/5
N2 - Many groups of engineers and researchers worldwide are involved in the application-oriented development of sensors. These efforts are often triggered by industrial applications and their extraordinary requirements in durability and reliability. Typical products are highly specialized sensors e.g. for temperature which are exposed to high physical and chemical stresses like in cutting or forming processes. One promising approach of space resolved or surface sensitive measurements is the use of thin film sensors. A key factor for the successful use is an insulating wear resistance layer on top of the sensor. In this report a well-known hard layer made from aluminum oxide was optimized under mechanical and electrical aspects.
AB - Many groups of engineers and researchers worldwide are involved in the application-oriented development of sensors. These efforts are often triggered by industrial applications and their extraordinary requirements in durability and reliability. Typical products are highly specialized sensors e.g. for temperature which are exposed to high physical and chemical stresses like in cutting or forming processes. One promising approach of space resolved or surface sensitive measurements is the use of thin film sensors. A key factor for the successful use is an insulating wear resistance layer on top of the sensor. In this report a well-known hard layer made from aluminum oxide was optimized under mechanical and electrical aspects.
KW - aluminum oxide
KW - deposition
KW - electrical properties
KW - mechanical properties
KW - PVD
KW - sputtering
KW - thin films
UR - http://www.scopus.com/inward/record.url?scp=84966603172&partnerID=8YFLogxK
U2 - 10.1109/EIConRusNW.2016.7448110
DO - 10.1109/EIConRusNW.2016.7448110
M3 - Conference contribution
AN - SCOPUS:84966603172
SP - 32
EP - 36
BT - Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016
A2 - Shaposhnikov, S.
PB - Institute of Electrical and Electronics Engineers Inc.
Y2 - 2 February 2016 through 3 February 2016
ER -