Details
| Original language | English |
|---|---|
| Pages (from-to) | 1961-1973 |
| Number of pages | 13 |
| Journal | Microsystem technologies |
| Volume | 14 |
| Issue number | 12 |
| Early online date | 9 Sept 2008 |
| Publication status | Published - Nov 2008 |
Abstract
In micro actuated systems, active guidances provide guiding a runner frictionless and fail-safe. Thus, the research objectives within the Collaborative Research Centre CRC516 sub-project C3 are related to aerostatic and magnetic principles for active guidances. Concerning guidances using the aerostatic principle, one version with thin-film techniques as well as one without were developed, manufactured with aid of other sub-projects, and tested. The force characteristics of the prototypes were determined and the dynamic behaviour of the aerostatic guidances was analysed within experimental investigations. Furthermore, an integrated capacitive displacement measurement system was developed and successfully validated within its prototypic functionality. Concerning the magnetic principle, guidances based on repulsive forces as well as on attractive forces were analysed. Hence, different types of controllers were developed and the behaviour of the controlled system was simulated by means of Matlab/Simulink and VisualNastran.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
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In: Microsystem technologies, Vol. 14, No. 12, 11.2008, p. 1961-1973.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Active linear guidances for micro actuators
T2 - alternative concepts and first prototypes
AU - Denkena, Berend
AU - Brehmeier, Stefan
AU - Möhring, Hans Christian
N1 - Funding Information: The authors would like to thank Mr. Dr.-Ing. J. Li for his support and the accomplished research work within sub-project C3. Last but not least the authors thank the Deutsche Forschungsgemeinschaft (DFG) for their financial support of the research work within CRC516.
PY - 2008/11
Y1 - 2008/11
N2 - In micro actuated systems, active guidances provide guiding a runner frictionless and fail-safe. Thus, the research objectives within the Collaborative Research Centre CRC516 sub-project C3 are related to aerostatic and magnetic principles for active guidances. Concerning guidances using the aerostatic principle, one version with thin-film techniques as well as one without were developed, manufactured with aid of other sub-projects, and tested. The force characteristics of the prototypes were determined and the dynamic behaviour of the aerostatic guidances was analysed within experimental investigations. Furthermore, an integrated capacitive displacement measurement system was developed and successfully validated within its prototypic functionality. Concerning the magnetic principle, guidances based on repulsive forces as well as on attractive forces were analysed. Hence, different types of controllers were developed and the behaviour of the controlled system was simulated by means of Matlab/Simulink and VisualNastran.
AB - In micro actuated systems, active guidances provide guiding a runner frictionless and fail-safe. Thus, the research objectives within the Collaborative Research Centre CRC516 sub-project C3 are related to aerostatic and magnetic principles for active guidances. Concerning guidances using the aerostatic principle, one version with thin-film techniques as well as one without were developed, manufactured with aid of other sub-projects, and tested. The force characteristics of the prototypes were determined and the dynamic behaviour of the aerostatic guidances was analysed within experimental investigations. Furthermore, an integrated capacitive displacement measurement system was developed and successfully validated within its prototypic functionality. Concerning the magnetic principle, guidances based on repulsive forces as well as on attractive forces were analysed. Hence, different types of controllers were developed and the behaviour of the controlled system was simulated by means of Matlab/Simulink and VisualNastran.
UR - http://www.scopus.com/inward/record.url?scp=51849118059&partnerID=8YFLogxK
U2 - 10.1007/s00542-008-0679-z
DO - 10.1007/s00542-008-0679-z
M3 - Article
AN - SCOPUS:51849118059
VL - 14
SP - 1961
EP - 1973
JO - Microsystem technologies
JF - Microsystem technologies
SN - 0946-7076
IS - 12
ER -