Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 |
| Editors | P. Shore, Henny Spaan, H. Van Brussel, Theresa Burke |
| Pages | 117-120 |
| Number of pages | 4 |
| ISBN (electronic) | 9780955308291 |
| Publication status | Published - 1 Jan 2011 |
| Event | 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 - Como, Italy Duration: 23 May 2011 → 26 May 2011 |
Publication series
| Name | Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 |
|---|---|
| Volume | 2 |
Abstract
In order to enable high precision motion in micro-systems, the application of active aerostatic as well as electromagnetic guides is presented in this paper. Both concepts have in common, that they prevent contact between the moving slide and the system's frame and allow precision movements at drive forces below 1 mN. In order to compensate for tilting and vertical displacement of the slide, an accurate air gap measurement system has to be developed and integrated in a highly limited installation space.
ASJC Scopus subject areas
- Engineering(all)
- Industrial and Manufacturing Engineering
- Engineering(all)
- Mechanical Engineering
- Materials Science(all)
- General Materials Science
- Physics and Astronomy(all)
- Instrumentation
- Environmental Science(all)
- Environmental Engineering
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Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011. ed. / P. Shore; Henny Spaan; H. Van Brussel; Theresa Burke. 2011. p. 117-120 (Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011; Vol. 2).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Active Guides for Precision Micro-systems
AU - Denkena, B.
AU - Möhring, H. C.
AU - Kayapinar, H.
PY - 2011/1/1
Y1 - 2011/1/1
N2 - In order to enable high precision motion in micro-systems, the application of active aerostatic as well as electromagnetic guides is presented in this paper. Both concepts have in common, that they prevent contact between the moving slide and the system's frame and allow precision movements at drive forces below 1 mN. In order to compensate for tilting and vertical displacement of the slide, an accurate air gap measurement system has to be developed and integrated in a highly limited installation space.
AB - In order to enable high precision motion in micro-systems, the application of active aerostatic as well as electromagnetic guides is presented in this paper. Both concepts have in common, that they prevent contact between the moving slide and the system's frame and allow precision movements at drive forces below 1 mN. In order to compensate for tilting and vertical displacement of the slide, an accurate air gap measurement system has to be developed and integrated in a highly limited installation space.
UR - http://www.scopus.com/inward/record.url?scp=84908236488&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84908236488
T3 - Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
SP - 117
EP - 120
BT - Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
A2 - Shore, P.
A2 - Spaan, Henny
A2 - Van Brussel, H.
A2 - Burke, Theresa
T2 - 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Y2 - 23 May 2011 through 26 May 2011
ER -