Details
| Original language | English |
|---|---|
| Title of host publication | Optical Technology and Measurement for Industrial Applications Conference |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| Number of pages | 5 |
| Volume | 11142 |
| ISBN (print) | 978-1-5106-2978-3 |
| Publication status | Published - 21 Apr 2019 |
| Event | Optical Technology and Measurement for Industrial Applications Conference 2019 - Yokohama, Japan Duration: 22 Apr 2019 → 26 Apr 2019 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| ISSN (Print) | 0277-786X |
Abstract
Morphological and inicrostructural characteristics are often characterized using the images of scanning electron microscopes (SEM). Unfortunately, the acquired image data is limited to two dimensions although the 3D structure of the specimen provides a large amount of classification options. Therefore. 3D reconstruction methods are used to obtain the necessary depth directly from the acquired SEM image data. In this paper, we want to evaluate a 3D reconstruction scheme, that can be applied to uncahbrated stereo-pair images to compute the depth of the scene directly from the disparity of the rectified stereo-pair, in terms of its accuracy. Registered 3D data acquired from multiple stereo-pairs is presented that allows to evaluate if the obtained results are truly metric reconstructions of the investigated specimen as well as to assess the further application possibilities.
Keywords
- 3D reconstruction, accuracy estimation, evaluation, metric, multiple stereo-pair images, scanning electron microscope
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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Optical Technology and Measurement for Industrial Applications Conference. Vol. 11142 Bellingham: SPIE, 2019. (Proceedings of SPIE - The International Society for Optical Engineering).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Accuracy estimation of a 3D reconstruction method for scanning electron microscope images
AU - Töberg, Stefan
AU - Reithmeier, Eduard
PY - 2019/4/21
Y1 - 2019/4/21
N2 - Morphological and inicrostructural characteristics are often characterized using the images of scanning electron microscopes (SEM). Unfortunately, the acquired image data is limited to two dimensions although the 3D structure of the specimen provides a large amount of classification options. Therefore. 3D reconstruction methods are used to obtain the necessary depth directly from the acquired SEM image data. In this paper, we want to evaluate a 3D reconstruction scheme, that can be applied to uncahbrated stereo-pair images to compute the depth of the scene directly from the disparity of the rectified stereo-pair, in terms of its accuracy. Registered 3D data acquired from multiple stereo-pairs is presented that allows to evaluate if the obtained results are truly metric reconstructions of the investigated specimen as well as to assess the further application possibilities.
AB - Morphological and inicrostructural characteristics are often characterized using the images of scanning electron microscopes (SEM). Unfortunately, the acquired image data is limited to two dimensions although the 3D structure of the specimen provides a large amount of classification options. Therefore. 3D reconstruction methods are used to obtain the necessary depth directly from the acquired SEM image data. In this paper, we want to evaluate a 3D reconstruction scheme, that can be applied to uncahbrated stereo-pair images to compute the depth of the scene directly from the disparity of the rectified stereo-pair, in terms of its accuracy. Registered 3D data acquired from multiple stereo-pairs is presented that allows to evaluate if the obtained results are truly metric reconstructions of the investigated specimen as well as to assess the further application possibilities.
KW - 3D reconstruction
KW - accuracy estimation
KW - evaluation
KW - metric
KW - multiple stereo-pair images
KW - scanning electron microscope
UR - http://www.scopus.com/inward/record.url?scp=85065797607&partnerID=8YFLogxK
U2 - 10.1117/12.2535570
DO - 10.1117/12.2535570
M3 - Conference contribution
AN - SCOPUS:85065797607
SN - 978-1-5106-2978-3
VL - 11142
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Technology and Measurement for Industrial Applications Conference
PB - SPIE
CY - Bellingham
T2 - Optical Technology and Measurement for Industrial Applications Conference 2019
Y2 - 22 April 2019 through 26 April 2019
ER -