Details
| Original language | English |
|---|---|
| Title of host publication | Laser-Induced Damage in Optical Materials |
| Subtitle of host publication | 2002 and 7th International Workshop on Laser Beam and Optics Characterization |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| Pages | 467-474 |
| Number of pages | 8 |
| ISBN (print) | 0-8194-4727-7 |
| Publication status | Published - 20 May 2003 |
| Externally published | Yes |
| Event | Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization - Boulder, CO, United States Duration: 16 Sept 2002 → 18 Sept 2002 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 4932 |
| ISSN (Print) | 0277-786X |
Abstract
The determination of absorptance in optical components is of crucial interest in respect to their power-handling capability. As a fundamental loss mechanism in the DUV/VUV spectral range, the absorptance is a significant parameter to decide the applicability of an optic in the industrial facilities. The established measuring technique of laser-calorimetry in accordance to the standard ISO 11551 was adapted to the wavelength of the ArF-laser (λ = 193 nm). The present paper describes the developed set-up considering the problems of calibration in the DUV spectral range. In detail, the electrical and optical calibration method were performed and different effects are discussed with regard to the practicability of both procedures. Furthermore, the reduction of scattered light in combination with a remarkable increase in sensitivity is demonstrated. As typical substrate materials for optical components at this laser wavelength, fused silica and Cap2 were investigated determining the absorptance. Simultaneously, the characteristic luminescence spectrum has been recorded during the investigations.
Keywords
- Absorptance, DUV, ISO 11551, Laser calorimetry, Loss mechanisms
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization. Bellingham: SPIE, 2003. p. 467-474 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 4932).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Absorptance measurements for the DUV spectral range by laser calorimetry
AU - Blaschke, Holger
AU - Jupé, Marco
AU - Ristau, Detlev
PY - 2003/5/20
Y1 - 2003/5/20
N2 - The determination of absorptance in optical components is of crucial interest in respect to their power-handling capability. As a fundamental loss mechanism in the DUV/VUV spectral range, the absorptance is a significant parameter to decide the applicability of an optic in the industrial facilities. The established measuring technique of laser-calorimetry in accordance to the standard ISO 11551 was adapted to the wavelength of the ArF-laser (λ = 193 nm). The present paper describes the developed set-up considering the problems of calibration in the DUV spectral range. In detail, the electrical and optical calibration method were performed and different effects are discussed with regard to the practicability of both procedures. Furthermore, the reduction of scattered light in combination with a remarkable increase in sensitivity is demonstrated. As typical substrate materials for optical components at this laser wavelength, fused silica and Cap2 were investigated determining the absorptance. Simultaneously, the characteristic luminescence spectrum has been recorded during the investigations.
AB - The determination of absorptance in optical components is of crucial interest in respect to their power-handling capability. As a fundamental loss mechanism in the DUV/VUV spectral range, the absorptance is a significant parameter to decide the applicability of an optic in the industrial facilities. The established measuring technique of laser-calorimetry in accordance to the standard ISO 11551 was adapted to the wavelength of the ArF-laser (λ = 193 nm). The present paper describes the developed set-up considering the problems of calibration in the DUV spectral range. In detail, the electrical and optical calibration method were performed and different effects are discussed with regard to the practicability of both procedures. Furthermore, the reduction of scattered light in combination with a remarkable increase in sensitivity is demonstrated. As typical substrate materials for optical components at this laser wavelength, fused silica and Cap2 were investigated determining the absorptance. Simultaneously, the characteristic luminescence spectrum has been recorded during the investigations.
KW - Absorptance
KW - DUV
KW - ISO 11551
KW - Laser calorimetry
KW - Loss mechanisms
UR - http://www.scopus.com/inward/record.url?scp=0042862973&partnerID=8YFLogxK
U2 - 10.1117/12.472385
DO - 10.1117/12.472385
M3 - Conference contribution
AN - SCOPUS:0042862973
SN - 0-8194-4727-7
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 467
EP - 474
BT - Laser-Induced Damage in Optical Materials
PB - SPIE
CY - Bellingham
T2 - Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization
Y2 - 16 September 2002 through 18 September 2002
ER -