Details
| Original language | English |
|---|---|
| Pages (from-to) | 139-158 |
| Number of pages | 20 |
| Journal | Archive for Rational Mechanics and Analysis |
| Volume | 207 |
| Issue number | 1 |
| Publication status | Published - Jan 2013 |
Abstract
We investigate a free boundary problem describing small deformations in a membrane based model of electrostatically actuated microelectromechanical systems (MEMS). The existence of stationary solutions is established for small voltage values and non-existence is obtained for high voltage values. We give a justification of the widely studied narrow-gap model by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
ASJC Scopus subject areas
- Mathematics(all)
- Analysis
- Mathematics(all)
- Mathematics (miscellaneous)
- Engineering(all)
- Mechanical Engineering
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In: Archive for Rational Mechanics and Analysis, Vol. 207, No. 1, 01.2013, p. 139-158.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - A stationary free boundary problem modeling electrostatic MEMS
AU - Laurençot, Philippe
AU - Walker, Christoph
N1 - Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2013/1
Y1 - 2013/1
N2 - We investigate a free boundary problem describing small deformations in a membrane based model of electrostatically actuated microelectromechanical systems (MEMS). The existence of stationary solutions is established for small voltage values and non-existence is obtained for high voltage values. We give a justification of the widely studied narrow-gap model by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
AB - We investigate a free boundary problem describing small deformations in a membrane based model of electrostatically actuated microelectromechanical systems (MEMS). The existence of stationary solutions is established for small voltage values and non-existence is obtained for high voltage values. We give a justification of the widely studied narrow-gap model by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.
UR - http://www.scopus.com/inward/record.url?scp=84872000564&partnerID=8YFLogxK
U2 - 10.1007/s00205-012-0559-7
DO - 10.1007/s00205-012-0559-7
M3 - Article
AN - SCOPUS:84872000564
VL - 207
SP - 139
EP - 158
JO - Archive for Rational Mechanics and Analysis
JF - Archive for Rational Mechanics and Analysis
SN - 0003-9527
IS - 1
ER -