Details
| Original language | English |
|---|---|
| Article number | 035325 |
| Journal | AIP Advances |
| Volume | 8 |
| Issue number | 3 |
| Publication status | Published - Mar 2018 |
| Externally published | Yes |
Abstract
In this paper the design of a simple, space constrained chemical vapour deposition reactor for diamond growth is detailed. Based on the design by NIRIM, the reactor is composed of a quartz discharge tube placed within a 2.45 GHz waveguide to create the conditions required for metastable growth of diamond. Utilising largely off-the-shelf components and a modular design, the reactor allows for easy modification, repair, and cleaning between growth runs. The elements of the reactor design are laid out with the CAD files, parts list, and control files made easily available to enable replication. Finally, the quality of nanocrystalline diamond films produced are studied with SEM and Raman spectroscopy, with the observation of clear faceting and a large diamond fraction suggesting the design offers deposition of diamond with minimal complexity.
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
In: AIP Advances, Vol. 8, No. 3, 035325, 03.2018.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - A simple, space constrained NIRIM type reactor for chemical vapour deposition of diamond
AU - Thomas, Evan L. H.
AU - Ginés, Laia
AU - Mandal, Soumen
AU - Klemencic, Georgina M.
AU - Williams, Oliver A.
N1 - Publisher Copyright: © 2018 Author(s).
PY - 2018/3
Y1 - 2018/3
N2 - In this paper the design of a simple, space constrained chemical vapour deposition reactor for diamond growth is detailed. Based on the design by NIRIM, the reactor is composed of a quartz discharge tube placed within a 2.45 GHz waveguide to create the conditions required for metastable growth of diamond. Utilising largely off-the-shelf components and a modular design, the reactor allows for easy modification, repair, and cleaning between growth runs. The elements of the reactor design are laid out with the CAD files, parts list, and control files made easily available to enable replication. Finally, the quality of nanocrystalline diamond films produced are studied with SEM and Raman spectroscopy, with the observation of clear faceting and a large diamond fraction suggesting the design offers deposition of diamond with minimal complexity.
AB - In this paper the design of a simple, space constrained chemical vapour deposition reactor for diamond growth is detailed. Based on the design by NIRIM, the reactor is composed of a quartz discharge tube placed within a 2.45 GHz waveguide to create the conditions required for metastable growth of diamond. Utilising largely off-the-shelf components and a modular design, the reactor allows for easy modification, repair, and cleaning between growth runs. The elements of the reactor design are laid out with the CAD files, parts list, and control files made easily available to enable replication. Finally, the quality of nanocrystalline diamond films produced are studied with SEM and Raman spectroscopy, with the observation of clear faceting and a large diamond fraction suggesting the design offers deposition of diamond with minimal complexity.
UR - http://www.scopus.com/inward/record.url?scp=85044732689&partnerID=8YFLogxK
U2 - 10.1063/1.5009182
DO - 10.1063/1.5009182
M3 - Article
VL - 8
JO - AIP Advances
JF - AIP Advances
SN - 2158-3226
IS - 3
M1 - 035325
ER -