Details
| Original language | English |
|---|---|
| Pages (from-to) | 6269-6272 |
| Number of pages | 4 |
| Journal | Optics letters |
| Volume | 49 |
| Issue number | 21 |
| Early online date | 17 Oct 2024 |
| Publication status | Published - 29 Oct 2024 |
Abstract
We present what we believe to be a novel, geometrically scalable manufacturing method for creating compact, low-resonance frequency, and high quality factor fused silica resonators. These resonators are intended to be used in inertial sensors for measuring external disturbances of sensitive physics experiments. The novel method uses direct bonding and chemical-mechanical polishing (CMP) in order to overcome the limitations of current subtractive manufacturing methods, which face prohibitive cost and complexity as material removal increases, inherently restricting the design flexibility of the resonator. We demonstrate a prototype with a test mass of only 3 g that reaches a quality factor of Q = 118 000 ± 400 at a resonance frequency of below 20 Hz. This advancement is particularly significant for future gravitational wave observatories, such as the Einstein Telescope.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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In: Optics letters, Vol. 49, No. 21, 29.10.2024, p. 6269-6272.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - A geometrically scalable method for manufacturing high quality factor mechanical resonators
AU - Birckigt, Pascal
AU - Carter, Jonathan J.
AU - Koehlenbeck, Sina M.
AU - Leibeling, Gilbert
AU - Risse, Stefan
N1 - Publisher Copyright: © 2024 Optica Publishing Group.
PY - 2024/10/29
Y1 - 2024/10/29
N2 - We present what we believe to be a novel, geometrically scalable manufacturing method for creating compact, low-resonance frequency, and high quality factor fused silica resonators. These resonators are intended to be used in inertial sensors for measuring external disturbances of sensitive physics experiments. The novel method uses direct bonding and chemical-mechanical polishing (CMP) in order to overcome the limitations of current subtractive manufacturing methods, which face prohibitive cost and complexity as material removal increases, inherently restricting the design flexibility of the resonator. We demonstrate a prototype with a test mass of only 3 g that reaches a quality factor of Q = 118 000 ± 400 at a resonance frequency of below 20 Hz. This advancement is particularly significant for future gravitational wave observatories, such as the Einstein Telescope.
AB - We present what we believe to be a novel, geometrically scalable manufacturing method for creating compact, low-resonance frequency, and high quality factor fused silica resonators. These resonators are intended to be used in inertial sensors for measuring external disturbances of sensitive physics experiments. The novel method uses direct bonding and chemical-mechanical polishing (CMP) in order to overcome the limitations of current subtractive manufacturing methods, which face prohibitive cost and complexity as material removal increases, inherently restricting the design flexibility of the resonator. We demonstrate a prototype with a test mass of only 3 g that reaches a quality factor of Q = 118 000 ± 400 at a resonance frequency of below 20 Hz. This advancement is particularly significant for future gravitational wave observatories, such as the Einstein Telescope.
UR - http://www.scopus.com/inward/record.url?scp=85208290252&partnerID=8YFLogxK
U2 - 10.1364/OL.542065
DO - 10.1364/OL.542065
M3 - Article
C2 - 39485464
AN - SCOPUS:85208290252
VL - 49
SP - 6269
EP - 6272
JO - Optics letters
JF - Optics letters
SN - 0146-9592
IS - 21
ER -