Details
| Original language | English |
|---|---|
| Pages (from-to) | 2549-2568 |
| Number of pages | 20 |
| Journal | Mathematical Models and Methods in Applied Sciences |
| Volume | 24 |
| Issue number | 13 |
| Publication status | Published - 15 Dec 2014 |
Abstract
Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically conductive elastic plate suspended above a fixed ground plate together with the electrostatic potential in the free domain between the two plates. The electrostatic potential is harmonic in that domain and its values are held fixed along each plate. The equation for the elastic plate deflection is a parabolic quasilinear fourth-order equation, which is coupled to the gradient trace of the electrostatic potential on the elastic plate.
Keywords
- Bending, Curvature, Free boundary problem, MEMS, Well-posedness
ASJC Scopus subject areas
- Mathematics(all)
- Modelling and Simulation
- Mathematics(all)
- Applied Mathematics
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In: Mathematical Models and Methods in Applied Sciences, Vol. 24, No. 13, 15.12.2014, p. 2549-2568.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - A free boundary problem modeling electrostatic MEMS
T2 - II. Nonlinear bending effects
AU - Laurençot, Philippe
AU - Walker, Christoph
N1 - Funding information: The work of Ph.L. was partially supported by the CIMI (Centre International de Mathématiques et d’Informatique) Excellence program ANR-11-LABX-0040-CIMI within the program ANR-11-IDEX-0002-02 and by the Deutscher Akademischer Austausch Dienst (DAAD) while enjoying the hospitality of the Institut für Ange-wandte Mathematik, Leibniz Universität Hannover.
PY - 2014/12/15
Y1 - 2014/12/15
N2 - Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically conductive elastic plate suspended above a fixed ground plate together with the electrostatic potential in the free domain between the two plates. The electrostatic potential is harmonic in that domain and its values are held fixed along each plate. The equation for the elastic plate deflection is a parabolic quasilinear fourth-order equation, which is coupled to the gradient trace of the electrostatic potential on the elastic plate.
AB - Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically conductive elastic plate suspended above a fixed ground plate together with the electrostatic potential in the free domain between the two plates. The electrostatic potential is harmonic in that domain and its values are held fixed along each plate. The equation for the elastic plate deflection is a parabolic quasilinear fourth-order equation, which is coupled to the gradient trace of the electrostatic potential on the elastic plate.
KW - Bending
KW - Curvature
KW - Free boundary problem
KW - MEMS
KW - Well-posedness
UR - http://www.scopus.com/inward/record.url?scp=84929605784&partnerID=8YFLogxK
U2 - 10.1142/S0218202514500298
DO - 10.1142/S0218202514500298
M3 - Article
AN - SCOPUS:84929605784
VL - 24
SP - 2549
EP - 2568
JO - Mathematical Models and Methods in Applied Sciences
JF - Mathematical Models and Methods in Applied Sciences
SN - 0218-2025
IS - 13
ER -