Details
| Translated title of the contribution | 3D surface measurement with a scanning electron microscope |
|---|---|
| Original language | German |
| Pages (from-to) | 496-502 |
| Number of pages | 7 |
| Journal | Technisches Messen |
| Volume | 76 |
| Issue number | 11 |
| Publication status | Published - 4 Dec 2009 |
Abstract
The measurement of technical surfaces with microstructures is a central question of metrology. In this paper the 3D reconstruction method of scanning electron microscope (SEM) images is introduced. For the verification of the method the SEM was provided with two detectors.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Instrumentation
- Engineering(all)
- Electrical and Electronic Engineering
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In: Technisches Messen, Vol. 76, No. 11, 04.12.2009, p. 496-502.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - 3D-Oberflächenvermessung mit einem Stereo-Rasterelektronenmikroskop
AU - Vynnyk, Taras
AU - Fahlbusch, Thomas
AU - Reithmeier, Eduard
PY - 2009/12/4
Y1 - 2009/12/4
N2 - The measurement of technical surfaces with microstructures is a central question of metrology. In this paper the 3D reconstruction method of scanning electron microscope (SEM) images is introduced. For the verification of the method the SEM was provided with two detectors.
AB - The measurement of technical surfaces with microstructures is a central question of metrology. In this paper the 3D reconstruction method of scanning electron microscope (SEM) images is introduced. For the verification of the method the SEM was provided with two detectors.
KW - Photometric method
KW - Scanning electron microscope (SEM)
KW - Surface measurement
UR - http://www.scopus.com/inward/record.url?scp=70449506965&partnerID=8YFLogxK
U2 - 10.1524/teme.2009.0898
DO - 10.1524/teme.2009.0898
M3 - Artikel
AN - SCOPUS:70449506965
VL - 76
SP - 496
EP - 502
JO - Technisches Messen
JF - Technisches Messen
SN - 0171-8096
IS - 11
ER -