3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

Research output: Contribution to journal › Article › Research › peer review

Authors

  • T. Vynnyk
  • T. Schultheis
  • T. Fahlbusch
  • E. Reithmeier

Research Organisations

View graph of relations

Details

Original languageEnglish
Article number10038s
JournalJournal of the European Optical Society
Volume5
Publication statusPublished - 2010

Abstract

In this paper the photometric or the so called "shape from shading" method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.

Keywords

    3D-surface reconstruction, Hologram, Holographic diffraction grating, Shape from shading, Stereo electron microscope (SEM)

ASJC Scopus subject areas

Cite this

3D-measurement with the stereo scanning electron microscope on sub-micrometer structures. / Vynnyk, T.; Schultheis, T.; Fahlbusch, T. et al.
In: Journal of the European Optical Society, Vol. 5, 10038s, 2010.

Research output: Contribution to journal › Article › Research › peer review

Vynnyk T, Schultheis T, Fahlbusch T, Reithmeier E. 3D-measurement with the stereo scanning electron microscope on sub-micrometer structures. Journal of the European Optical Society. 2010;5:10038s. doi: 10.2971/jeos.2010.10038s
Download
@article{3e373d8a61224272ab1a50299797c499,
title = "3D-measurement with the stereo scanning electron microscope on sub-micrometer structures",
abstract = "In this paper the photometric or the so called {"}shape from shading{"} method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.",
keywords = "3D-surface reconstruction, Hologram, Holographic diffraction grating, Shape from shading, Stereo electron microscope (SEM)",
author = "T. Vynnyk and T. Schultheis and T. Fahlbusch and E. Reithmeier",
year = "2010",
doi = "10.2971/jeos.2010.10038s",
language = "English",
volume = "5",
journal = "Journal of the European Optical Society",
issn = "1990-2573",
publisher = "IOP Publishing Ltd.",

}

Download

TY - JOUR

T1 - 3D-measurement with the stereo scanning electron microscope on sub-micrometer structures

AU - Vynnyk, T.

AU - Schultheis, T.

AU - Fahlbusch, T.

AU - Reithmeier, E.

PY - 2010

Y1 - 2010

N2 - In this paper the photometric or the so called "shape from shading" method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.

AB - In this paper the photometric or the so called "shape from shading" method is presented. In comparison to existing methods the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. This new method was experimentally verified by measuring a steel sphere, a holographic grating and a hologram.

KW - 3D-surface reconstruction

KW - Hologram

KW - Holographic diffraction grating

KW - Shape from shading

KW - Stereo electron microscope (SEM)

UR - http://www.scopus.com/inward/record.url?scp=79954985922&partnerID=8YFLogxK

U2 - 10.2971/jeos.2010.10038s

DO - 10.2971/jeos.2010.10038s

M3 - Article

AN - SCOPUS:79954985922

VL - 5

JO - Journal of the European Optical Society

JF - Journal of the European Optical Society

SN - 1990-2573

M1 - 10038s

ER -