3D-measurement using a scanning electron microscope

Research output: Contribution to journal › Article › Research › peer review

Authors

  • Eduard Reithmeier
  • Taras Vynnyk
  • Thanin Schultheis

Research Organisations

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Details

Original languageEnglish
Pages (from-to)1193-1201
Number of pages9
JournalApplied Mathematics and Computation
Volume217
Issue number3
Publication statusPublished - 1 Oct 2010

Abstract

In this paper the improved photometric or the so called "Shape From Shading" method is presented. In comparison to known and established approaches the efficiency of the detector system was considered and the requirements of the cosine Lambert's law for the angle distribution of the emitted electrons are suppressed. The method retrieves more accurate data of sub-micrometer substructures like diffractive optical elements (DOE) due to an increased lateral resolution and works more efficiently than widely used comparable techniques.

Keywords

    Backscattered electrons, Photometric method, Scanning electron microscope, Secondary electrons, Shape from shading

ASJC Scopus subject areas

Cite this

3D-measurement using a scanning electron microscope. / Reithmeier, Eduard; Vynnyk, Taras; Schultheis, Thanin.
In: Applied Mathematics and Computation, Vol. 217, No. 3, 01.10.2010, p. 1193-1201.

Research output: Contribution to journal › Article › Research › peer review

Reithmeier, E, Vynnyk, T & Schultheis, T 2010, '3D-measurement using a scanning electron microscope', Applied Mathematics and Computation, vol. 217, no. 3, pp. 1193-1201. https://doi.org/10.1016/j.amc.2010.01.107
Reithmeier E, Vynnyk T, Schultheis T. 3D-measurement using a scanning electron microscope. Applied Mathematics and Computation. 2010 Oct 1;217(3):1193-1201. doi: 10.1016/j.amc.2010.01.107
Reithmeier, Eduard ; Vynnyk, Taras ; Schultheis, Thanin. / 3D-measurement using a scanning electron microscope. In: Applied Mathematics and Computation. 2010 ; Vol. 217, No. 3. pp. 1193-1201.
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