Details
| Original language | English |
|---|---|
| Pages (from-to) | 477-481 |
| Number of pages | 5 |
| Journal | Advanced Metallization Conference (AMC) |
| Publication status | Published - 2000 |
| Event | Advanced Metallization Conference 2000 - San Diego, CA, United States Duration: 2 Oct 2000 → 4 Oct 2000 |
Abstract
For reliability prediction in metallization structures the different migration mechanisms caused by high loading conditions become more and more important. With numerical methods like the finite element method (FEM), it is possible to determine the weakest part of the structure. This paper presents a new method for time dependent 3-dimensional degradation simulations of metallization structures stressed by high current densities. The FE-method offers the possibility to predict the progress of the degradation, and to estimate the reliability by calculating the corresponding Time To Failure (TTF) value. The simulation results are in good agreement with SEM observations and measurements.
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In: Advanced Metallization Conference (AMC), 2000, p. 477-481.
Research output: Contribution to journal › Conference article › Research › peer review
}
TY - JOUR
T1 - 3-D time-depending electro- and thermomigration simulation of metallization structures
AU - Dalleau, D.
AU - Weide-Zaage, K.
N1 - Copyright: Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.
PY - 2000
Y1 - 2000
N2 - For reliability prediction in metallization structures the different migration mechanisms caused by high loading conditions become more and more important. With numerical methods like the finite element method (FEM), it is possible to determine the weakest part of the structure. This paper presents a new method for time dependent 3-dimensional degradation simulations of metallization structures stressed by high current densities. The FE-method offers the possibility to predict the progress of the degradation, and to estimate the reliability by calculating the corresponding Time To Failure (TTF) value. The simulation results are in good agreement with SEM observations and measurements.
AB - For reliability prediction in metallization structures the different migration mechanisms caused by high loading conditions become more and more important. With numerical methods like the finite element method (FEM), it is possible to determine the weakest part of the structure. This paper presents a new method for time dependent 3-dimensional degradation simulations of metallization structures stressed by high current densities. The FE-method offers the possibility to predict the progress of the degradation, and to estimate the reliability by calculating the corresponding Time To Failure (TTF) value. The simulation results are in good agreement with SEM observations and measurements.
UR - http://www.scopus.com/inward/record.url?scp=0034462055&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:0034462055
SP - 477
EP - 481
JO - Advanced Metallization Conference (AMC)
JF - Advanced Metallization Conference (AMC)
SN - 1048-0854
T2 - Advanced Metallization Conference 2000
Y2 - 2 October 2000 through 4 October 2000
ER -