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Publications
2023
- Published
Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride
Lampouras, I., Holz, M., Strehle, S. & Körner, J., 28 Nov 2023, In: Journal of Micromechanics and Microengineering. 34, 1, 15 p., 015005.Research output: Contribution to journal › Article › Research › peer review
2022
- Published
Co-Resonant cantilevers for materials research and sensor applications
Körner, J., 2022, 2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest. Ghodssi, R. & Chan, J. F. (eds.). p. 448-449 2 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
2020
- External
Time-Domain Analysis of a Novel Co-Resonant Cantilever MEMS Sensor and Derivation of a New Measurement Concept Based on Beating
Bücken, G. & Körner, J., Oct 2020, In: Journal of Microelectromechanical Systems. 29, 5, p. 1032-1037 6 p., 9143424.Research output: Contribution to journal › Article › Research › peer review