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Advancement of the co-resonant sensor principle towards sensor applications by theoretical and experimental studies of sensitivity, detectability and damping

Project: Research

Participants

  • Julia Körner (Principal Investigator)
1 - 3 out of 3Page size: 20

Publications

  1. 2023

  2. Published

    Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride

    Lampouras, I., Holz, M., Strehle, S. & Körner, J., 28 Nov 2023, In: Journal of Micromechanics and Microengineering. 34, 1, 15 p., 015005.

    Research output: Contribution to journalArticleResearchpeer review

  3. 2022

  4. Published

    Co-Resonant cantilevers for materials research and sensor applications

    Körner, J., 2022, 2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest. Ghodssi, R. & Chan, J. F. (eds.). p. 448-449 2 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  5. 2020

  6. External

    Time-Domain Analysis of a Novel Co-Resonant Cantilever MEMS Sensor and Derivation of a New Measurement Concept Based on Beating

    Bücken, G. & Körner, J., Oct 2020, In: Journal of Microelectromechanical Systems. 29, 5, p. 1032-1037 6 p., 9143424.

    Research output: Contribution to journalArticleResearchpeer review