This subproject aims to investigate established coatings for their application behavior in XHV-adequate atmospheres and to explore novel coatings for the functionalization of tools and workpieces, which are used in cooperating subprojects. The prime novelty is thermal in-situ coating as well as an atmospheric pressure plasma treatment in XHV-adequate atmosphere, which specifically produces coatings on deoxidized surfaces that do not have any oxygen inclusions, and thus feature advantageous mechanical and chemical properties.