Having shown the successful deoxidation of copper and iron in the reducing protective atmospheres by a plasma technique, the further aim of this subproject is to expand the range of materials to other metals as well as complex systems like steels and alloys, which need to be fully deoxidized. The focus of the work lies on the variation of operating parameters of plasma as well as combination of plasma and thermal deoxidation with the aim of the improvement and deeper understanding of the deoxidation effect. In addition, the deoxidation modules for other sub-projects of the SFB will be further developed in order to integrate plasma-induced deoxidation into the manufacturing processes.