Details
| Status | Finished |
|---|---|
| Start/end date | 26 Nov 2019 → 31 Dec 2020 |
Funding
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Funding type
Funding scheme
- German Research Foundation (DFG)
- Collaborative Institutional Proposals
- Infrastructure: Major Research Instrumentation
Reactive ion etching
Project: Research
Participants
- Fei Ding (Principal Investigator)