Equipment
Nassbänke Reinigung und Strukturierung
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Mask-Aligner Süss MA 6
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Mask-Aligner Süss MA 150
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lackschleuder mit Heizplatte Süss Labspin 6
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lithografie, UV Kontakt und Proximity-Aligner Verbindungshalbleiter
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Plasma Asher TePla 100 und GIGAbatch 360M
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
HMDS-Hotplate Süss VP8 T/BM
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Spraycoater Süss AS8
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lackschleuder mit Heizplatte Süss Delta 80, HP8TT
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lithografie, UV Kontakt und Proximity-Aligner Elementhalbleiter
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Laser Nanofabrication System
Hannover Centre for Optical Technologies (HOT)Facility/Equipment: Major Research Instrumentation
Nanoimprint Lithography System
Hannover Centre for Optical Technologies (HOT)Facility/Equipment: Major Research Instrumentation
Optical Metrology System
Hannover Centre for Optical Technologies (HOT)Facility/Equipment: Major Research Instrumentation
Vertical furnace system
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Neuer Ansatz für eine optische Biopsie in der Melanomdiagnostik
Hannover Centre for Optical Technologies (HOT)Facility/Equipment: Major Research Instrumentation
Laboratory of Nano and Quantum Engineering (LNQE)
Schulze-Wischeler, F. (CEO) & Kerker, O. (Chief technical officer)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Building
Electron beam lithography
Ding, F. (Head) & Kerker, O. (Manager)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Major Research Instrumentation
Reactive ion etching
Ding, F. (Head) & Kerker, O. (Manager)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Major Research Instrumentation