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Leibniz Forschungsinitiativen und Leibniz Forschungszentren

Organisational unit: Other

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Equipment

  1. Mask-Aligner Süss MA 6

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  2. Mask-Aligner Süss MA 150

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  3. HMDS-Hotplate Süss VP8 T/BM

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  4. Spraycoater Süss AS8

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  5. Laser Nanofabrication System

    Roth, B. W. (Head)

    Hannover Centre for Optical Technologies (HOT)

    Facility/Equipment: Major Research Instrumentation

  6. Optical Metrology System

    Roth, B. W. (Head)

    Hannover Centre for Optical Technologies (HOT)

    Facility/Equipment: Major Research Instrumentation

  7. Vertical furnace system

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  8. Electron beam lithography

    Ding, F. (Head) & Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Major Research Instrumentation

  9. Reactive ion etching

    Ding, F. (Head) & Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Major Research Instrumentation

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