Publications
- 2007
- Published
Thermal stability of pt/epitaxial Gd2O3/Si stacks
Lipp, E., Eizenberg, M., Czernohorsky, M. & Osten, H. J., 2007, Materials Research Society Symposium Proceedings - Characterization of Oxide/Semiconductor Interfaces for CMOS Technologies. p. 64-69 6 p. (Materials Research Society Symposium Proceedings; vol. 996).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- 2006
- Published
Interface Engineering During Epitaxial Growth of High-K Lanthanide Oxides on Silicon
Osten, H. J., Czernohorsky, M., Bugiel, E., Kuehne, D. & Fissel, A., 1 Dec 2006, In: Materials Research Society Symposium Proceedings. 917, 1, p. 137-142 6 p.Research output: Contribution to journal › Conference article › Research › peer review
- Published
Dielectric functions, elasto-optical effects, and critical-point parameters of biaxially stressed Si1-yCy alloys on Si (0 0 1)
Zollner, S., Liu, J. P., Zaumseil, P., Osten, H. J. & Demkov, A. A., 28 Nov 2006, In: Semiconductor Science and Technology. 22, 1, p. S13-S20 S04.Research output: Contribution to journal › Article › Research › peer review
- Published
Molecular Beam Epitaxy of Rare-Earth Oxides
Osten, H. J., Bugiel, E., Czernohorsky, M., Elassar, Z., Kirfel, O. & Fissel, A., 28 Oct 2006, Rare Earth Oxide Thin Films: Growth, Characterization, and Applications. Fanciulli, M. & Scarel, G. (eds.). p. 101-114 14 p. (Topics in Applied Physics; vol. 106).Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
- Published
Formation of Si twinning-superlattice: First step towards Si polytype growth
Fissel, A., Bugiel, E., Wang, C. R. & Osten, H. J., 15 Oct 2006, In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 134, 2-3 SPEC. ISS., p. 138-141 4 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Impact of Si substrate orientations on electrical properties of crystalline Gd2O3 thin films for high- K application
Laha, A., Osten, H. J. & Fissel, A., 5 Oct 2006, In: Applied physics letters. 89, 14, 143514.Research output: Contribution to journal › Article › Research › peer review
- Published
Growth and characterization of crystalline gadolinium oxide on silicon carbide for high-K application
Fissel, A., Czemohorsky, M., Dargis, R. & Osten, H. J., Oct 2006, In: Superlattices and microstructures. 40, 4-6, p. 551-556 6 p.Research output: Contribution to journal › Article › Research › peer review
- Published
0.86-nm CET Gate Stacks With Epitaxial Gd2O3 High-k Dielectrics and FUSI NiSi Metal Electrodes
Gottlob, H. D. B., Echtermeyer, T., Schmidt, M., Mollenhauer, T., Efavi, J. K., Wahlbrink, T., Lemme, M. C., Czernohorsky, M., Bugiel, E., Fissel, A., Osten, H. J. & Kurz, H., 25 Sept 2006, In: IEEE electron device letters. 27, 10, p. 814-816 3 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Novel Approach for Fabrication of Single-Crystalline Insulator/Si/Insulator Nanostructures
Fissel, A., Kuehne, D., Bugiel, E. & Osten, H. J., 1 Sept 2006, In: Materials Research Society Symposium Proceedings. 928, 1, p. 7-12 6 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Residual strain in Ge films grown by surfactant-mediated epitaxy on Si(1 1 1) and Si(0 0 1) substrates
Wietler, T. F., Bugiel, E. & Hofmann, K. R., Aug 2006, In: Materials Science in Semiconductor Processing. 9, 4-5 SPEC. ISS., p. 659-663 5 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Characterization of crystalline rare-earth oxide high-K dielectrics grown by molecular beam epitaxy on silicon carbide
Fissel, A., Czernohorsky, M. & Osten, H. J., 26 Jul 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 2115-2118 4 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Fabrication of single-crystalline insulator/Si/insulator nanostructures
Fissel, A., Kühne, D., Bugiel, E. & Osten, H. J., 25 Jul 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 2041-2046 6 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Surfactant-mediated epitaxy of high-quality low-doped relaxed germanium films on silicon (001)
Wietler, T. F., Bugiel, E. & Hofmann, K. R., 5 Jun 2006, In: THIN SOLID FILMS. 508, 1-2, p. 6-9 4 p.Research output: Contribution to journal › Article › Research › peer review
- Published
CMOS integration of epitaxial Gd2O3 high-k gate dielectrics
Gottlob, H. D. B., Echtermeyer, T., Mollenhauer, T., Efavi, J. K., Schmidt, M., Wahlbrink, T., Lemme, M. C., Kurz, H., Czernohorsky, M., Bugiel, E., Osten, H. J. & Fissel, A., Jun 2006, In: Solid-State Electronics. 50, 6, p. 979-985 7 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Formation of twinning-superlattice regions by artificial stacking of Si layers
Fissel, A., Bugiel, E., Wang, C. R. & Osten, H. J., 1 May 2006, In: Journal of crystal growth. 290, 2, p. 392-397 6 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Crystalline ternary rare earth oxide with capacitance equivalent thickness below 1 nm for high-K application
Laha, A., Bugiel, E., Osten, H. J. & Fissel, A., 25 Apr 2006, In: Applied physics letters. 88, 17, 172107.Research output: Contribution to journal › Article › Research › peer review
- Published
Cooperative solid-vapor-phase epitaxy: An approach for fabrication of single-crystalline insulator/Si/insulator nanostructures
Fissel, A., Kühne, D., Bugiel, E. & Osten, H. J., 10 Apr 2006, In: Applied physics letters. 88, 15, 153105.Research output: Contribution to journal › Article › Research › peer review
- Published
Impact of oxygen supply during growth on the electrical properties of crystalline Gd2O3 thin films on Si(001)
Czernohorsky, M., Bugiel, E., Osten, H. J., Fissel, A. & Kirfel, O., 10 Apr 2006, In: Applied physics letters. 88, 15, 152905.Research output: Contribution to journal › Article › Research › peer review
- Published
Interface formation during molecular beam epitaxial growth of neodymium oxide on silicon
Fissel, A., Elassar, Z., Kirfel, O., Bugiel, E., Czernohorsky, M. & Osten, H. J., 5 Apr 2006, In: Journal of applied physics. 99, 7, 074105.Research output: Contribution to journal › Article › Research › peer review
- Published
Approaches to CMOS integration of epitaxial gadolinium oxide high-K dielectrics
Gottlob, H. D. B., Echtermeyer, T., Mollenhauer, T., Schmidt, M., Efavi, J. K., Wahlbrink, T., Lemme, M. C., Kurz, H., Endres, R., Stefanov, Y., Schwalke, U., Czernohorsky, M., Bugiel, E., Fissel, A. & Osten, H. J., 2006, ESSDERC 2006 : Proceedings of the 36th European Solid-State Device Research Conference. IEEE Computer Society, p. 150-153 4 p. 4099878Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review