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Equipment
Kathodenzerstäubungsanlage (Sputteranlage) HHV System ATS 500
Stupp, J. (Head) & Kerker, O. (Contact)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Institute of Electronic Materials and Devices
Organisational unit: Institute
- Website: http://www.mbe.uni-hannover.de
Type of address: Visitor addres
Schneiderberg 32
30167
Hannover