| Titles | - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- Journal of vacuum science and technology:
Nanotechnology & microelectronics
- J VAC SCI TECHNOL B
- Journal of Vacuum Science and Technology B
|
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| Additional searchable titles | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
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| ISSNs | 2166-2746, 0734-211X, 1071-1023 |
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| Additional searchable ISSN (electronic) | 2166-2754 |
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| Publisher | AVS Science and Technology Society |
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| ZDB-ID | 797726-8 |
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| Scopus ID | 32160 |
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