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Journal of Micro/ Nanolithography, MEMS, and MOEMS

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Publications

  1. 2016

  2. Published

    Direct hot embossing of microelements by means of photostructurable polyimide

    Akin, M., Rezem, M., Rahlves, M., Cromwell, K., Roth, B., Reithmeier, E., Wurz, M. C., Rissing, L. & Maier, H. J., 23 Aug 2016, In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 15, 3, 034506.

    Research output: Contribution to journal › Article › Research › peer review

  3. 2015

  4. Published

    Digital mirror devices and liquid crystal displays in maskless lithography for fabrication of polymer-based holographic structures

    Rahlves, M., Kelb, C., Rezem, M., Schlangen, S., Boroz, K., Gödeke, D., Ihme, M. & Roth, B., 25 Jul 2015, In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 14, 4, 15051SSP.

    Research output: Contribution to journal › Article › Research › peer review