Journal of Micro/ Nanolithography, MEMS, and MOEMS

Titles
  • Journal of Micro/ Nanolithography, MEMS, and MOEMS
  • Journal of micro/nanolithography, MEMS and MOEMS
  • J MICRO-NANOLITH MEM
  • Journal of Microlithography, Microfabrication and Microsystems
Additional searchable titlesJournal of Micro/Nanolithography, MEMS, and MOEMS
ISSNs1537-1646, 1932-5150
Additional searchable ISSN (electronic)1932-5134
PublisherSPIE
ZDB-ID2408595-9
Scopus ID7000153211