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  1. Lithografie, UV Kontakt und Proximity-Aligner Verbindungshalbleiter

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  2. Plasma Asher TePla 100 und GIGAbatch 360M

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  3. HMDS-Hotplate Süss VP8 T/BM

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  4. Spraycoater Süss AS8

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  5. Lackschleuder mit Heizplatte Süss Delta 80, HP8TT

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  6. Lithografie, UV Kontakt und Proximity-Aligner Elementhalbleiter

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  7. Antriebseinheit für einen druckaufgeladenen Hochgeschwindigkeitsaxialverdichter

    Seume, J. R. (Head)

    Institute of Turbomachinery and Fluid Dynamics

    Facility/Equipment: Major Research Instrumentation

  8. DC power supply

    Ponick, B. (Head)

    Institute of Drive Systems and Power Electronics

    Facility/Equipment: Major Research Instrumentation

  9. Zeit und Frequenz synchronisierte Langstrecken-Quantenkommunikation (InterSync)

    Ding, F. (Head)

    Institute of Solid State Physics

    Facility/Equipment: Major Research Instrumentation

  10. High precision multi-functional printing and coating system

    Overmeyer, L. (Head)

    Institute of Transport and Automation Technology

    Facility/Equipment: Major Research Instrumentation

  11. 5-Achs Präzisionsfräszentrum

    Denkena, B. (Head)

    Institute of Production Engineering and Machine Tools

    Facility/Equipment: Major Research Instrumentation

  12. NMR-spectrometer (400 MHz) for measurements in the liquid phase

    Polarz, S. (Head)

    Institute of Inorganic Chemistry

    Facility/Equipment: Major Research Instrumentation

  13. Kryo-Rasterelektronenmikroskop

    Endres, H. (Head) & Bittner, F. (Head)

    Institute of Plastics and Circular Economy

    Facility/Equipment: Major Research Instrumentation

  14. Mikromechanischer Messplatz

    Haist, M. (Head)

    Institute of Building Materials Science

    Facility/Equipment: Major Research Instrumentation

  15. Präzisionsoptik Assemblierungsanlage

    Ristau, D. (Head)

    Institute of Quantum Optics

    Facility/Equipment: Major Research Instrumentation

  16. Messplatz Oberflächenspektroskopie

    Haist, M. (Head)

    Institute of Building Materials Science

    Facility/Equipment: Major Research Instrumentation

  17. Kombiniertes System zur Fertigung und Vermessung von Prüfstands- und Instrumentierungskomponenten

    Seume, J. R. (Head)

    Institute of Turbomachinery and Fluid Dynamics

    Facility/Equipment: Major Research Instrumentation

  18. Ultra-hochauflösendes Rasterelektronenmikroskop

    Polarz, S. (Head)

    Institute of Inorganic Chemistry

    Facility/Equipment: Major Research Instrumentation

  19. 120 kV Transmission Electron Microscope

    Polarz, S. (Head)

    Institute of Inorganic Chemistry

    Facility/Equipment: Major Research Instrumentation

  20. Spitzenmessplatz zur Charakterisierung von mikroelektronischen Systemen

    Wicht, B. (Head)

    Mixed-Signal Circuits Section

    Facility/Equipment: Major Research Instrumentation

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