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  1. Vierspitzenmessplatz

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  2. Wafer-Probe-Station Cascade Summit 11000

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  3. Spektrales Ellipsometer Sentech SE 800

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  4. Drahtbonder, Wire-Bonder TPT HB16

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  5. 3D-Druck von Glassubstraten, LightFab 3D Printer M mit IR-Laser 1030 nm

    Stupp, J. (Head) & Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  6. Polyimid-Ofen

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  7. Schnellheizöfen (RTP/RTO/RTA)

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  8. Widerstandsverdampfer "Congo Vac"

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  9. Kathodenzerstäubungsanlage (Sputteranlage) Leybold Z590

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  10. Elektronenstrahlverdampfer Balzers BAK 610

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  11. Plasma CVD Oxford Plasmalab 90

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  12. Horizontal-Clustersystem (Ofen)

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  13. Ionenimplanter Varian VIISta HCS

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  14. Reaktive Ionenätzanlage RIE (SF6 und CHF3)

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  15. Rasterelektronenmikroskop mit e-Beam Lithografie

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  16. Semitool Spin Rinser Dryer

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  17. Nassbänke Reinigung und Strukturierung

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  18. Mask-Aligner Süss MA 6

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  19. Mask-Aligner Süss MA 150

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  20. Lackschleuder mit Heizplatte Süss Labspin 6

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

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