1. Mask-Aligner Süss MA 6

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  2. Mask-Aligner Süss MA 150

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  3. HMDS-Hotplate Süss VP8 T/BM

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  4. Spraycoater Süss AS8

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  5. DC power supply

    Ponick, B. (Head)

    Institute of Drive Systems and Power Electronics

    Facility/Equipment: Major Research Instrumentation

  6. 5-Achs Präzisionsfräszentrum

    Denkena, B. (Head)

    Institute of Production Engineering and Machine Tools

    Facility/Equipment: Major Research Instrumentation

  7. NMR-spectrometer (400 MHz) for measurements in the liquid phase

    Polarz, S. (Head)

    Institute of Inorganic Chemistry

    Facility/Equipment: Major Research Instrumentation

  8. Kryo-Rasterelektronenmikroskop

    Endres, H. (Head) & Bittner, F. (Head)

    Institute of Plastics and Circular Economy

    Facility/Equipment: Major Research Instrumentation

  9. Mikromechanischer Messplatz

    Haist, M. (Head)

    Institute of Building Materials Science

    Facility/Equipment: Major Research Instrumentation

  10. Präzisionsoptik Assemblierungsanlage

    Ristau, D. (Head)

    Institute of Quantum Optics

    Facility/Equipment: Major Research Instrumentation

  11. Messplatz Oberflächenspektroskopie

    Haist, M. (Head)

    Institute of Building Materials Science

    Facility/Equipment: Major Research Instrumentation