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Mask-Aligner Süss MA 6
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Mask-Aligner Süss MA 150
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lackschleuder mit Heizplatte Süss Labspin 6
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lithografie, UV Kontakt und Proximity-Aligner Verbindungshalbleiter
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Plasma Asher TePla 100 und GIGAbatch 360M
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
HMDS-Hotplate Süss VP8 T/BM
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Spraycoater Süss AS8
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lackschleuder mit Heizplatte Süss Delta 80, HP8TT
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lithografie, UV Kontakt und Proximity-Aligner Elementhalbleiter
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Antriebseinheit für einen druckaufgeladenen Hochgeschwindigkeitsaxialverdichter
Seume, J. R. (Head)
Institute of Turbomachinery and Fluid DynamicsFacility/Equipment: Major Research Instrumentation
DC power supply
Ponick, B. (Head)
Institute of Drive Systems and Power ElectronicsFacility/Equipment: Major Research Instrumentation
Zeit und Frequenz synchronisierte Langstrecken-Quantenkommunikation (InterSync)
Institute of Solid State PhysicsFacility/Equipment: Major Research Instrumentation
High precision multi-functional printing and coating system
Overmeyer, L. (Head)
Institute of Transport and Automation TechnologyFacility/Equipment: Major Research Instrumentation
5-Achs Präzisionsfräszentrum
Denkena, B. (Head)
Institute of Production Engineering and Machine ToolsFacility/Equipment: Major Research Instrumentation
NMR-spectrometer (400 MHz) for measurements in the liquid phase
Polarz, S. (Head)
Institute of Inorganic ChemistryFacility/Equipment: Major Research Instrumentation
Kryo-Rasterelektronenmikroskop
Endres, H. (Head) & Bittner, F. (Head)
Institute of Plastics and Circular EconomyFacility/Equipment: Major Research Instrumentation
Mikromechanischer Messplatz
Institute of Building Materials ScienceFacility/Equipment: Major Research Instrumentation
Präzisionsoptik Assemblierungsanlage
Ristau, D. (Head)
Institute of Quantum OpticsFacility/Equipment: Major Research Instrumentation
Messplatz Oberflächenspektroskopie
Institute of Building Materials ScienceFacility/Equipment: Major Research Instrumentation
Kombiniertes System zur Fertigung und Vermessung von Prüfstands- und Instrumentierungskomponenten
Seume, J. R. (Head)
Institute of Turbomachinery and Fluid DynamicsFacility/Equipment: Major Research Instrumentation