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Transmissionselektronenmikroskop TEM FEI Tecnai G2 F20 TMP
Schulze-Wischeler, F. (Head)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Rasterkraftmikroskop (Nanosurf CoreAFM)
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Konfokalmikroskop Leica DCM 3D
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Vierspitzenmessplatz
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Wafer-Probe-Station Cascade Summit 11000
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Spektrales Ellipsometer Sentech SE 800
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Drahtbonder, Wire-Bonder TPT HB16
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
3D-Druck von Glassubstraten, LightFab 3D Printer M mit IR-Laser 1030 nm
Stupp, J. (Head) & Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Polyimid-Ofen
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Schnellheizöfen (RTP/RTO/RTA)
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Widerstandsverdampfer "Congo Vac"
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Kathodenzerstäubungsanlage (Sputteranlage) Leybold Z590
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Elektronenstrahlverdampfer Balzers BAK 610
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Plasma CVD Oxford Plasmalab 90
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Horizontal-Clustersystem (Ofen)
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Ionenimplanter Varian VIISta HCS
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Reaktive Ionenätzanlage RIE (SF6 und CHF3)
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Rasterelektronenmikroskop mit e-Beam Lithografie
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Semitool Spin Rinser Dryer
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation
Nassbänke Reinigung und Strukturierung
Kerker, O. (Manager)
Laboratory of Nano and Quantum Engineering
Facility/Equipment: Research Instrumentation

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