Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Advances in Optical Interference Coatings |
| Untertitel | 25 - 27 May 1999, Berlin, Germany |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| Seiten | 436-445 |
| Seitenumfang | 10 |
| ISBN (Print) | 0-8194-3212-1 |
| Publikationsstatus | Veröffentlicht - 7 Sept. 1999 |
| Extern publiziert | Ja |
| Veranstaltung | 1999 Advances in Optical Interference Coatings - Berlin, Ger Dauer: 25 Mai 1999 → 27 Mai 1999 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 3738 |
| ISSN (Print) | 0277-786X |
Abstract
In high quality optical coating systems for the DUV-spectral range, MgF2 is one of the preferred deposition materials. MgF2-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF2 is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF2 were deposited on superpolished fused silica and CaF2-substrates by ion beam sputtering (IBS, [2]), boat (bPVD) and e-beam (ePVD) evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques involving conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The optical constants of the MgF2-layers, which were determined by two independent data reduction algorithms from the spectral behaviour, are in good agreement with values published in the open literature: The refractive indices range between 1.40 and 1.41 at 248 nm for the PVD and IBS processes. The IBS-process achieves best homogeneity and lowest surface roughness around 1nmrms among the processes compared. In contrast to PVD coatings, which exhibit tensile mechanical stress ranging approximately from 300 to 400 MPa, high compressive stress of up to 910 MPa occurs in the IBS- coatings. The experimental findings are discussed in respect to the microstructural properties and the surface topography of the coatings.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
Zitieren
- Standard
- Harvard
- Apa
- Vancouver
- BibTex
- RIS
Advances in Optical Interference Coatings: 25 - 27 May 1999, Berlin, Germany. Bellingham: SPIE, 1999. S. 436-445 (Proceedings of SPIE - The International Society for Optical Engineering; Band 3738).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - UV-optical and microstructural properties of MgF2-coatings deposited by IBS and PVD processes
AU - Ristau, Detlev
AU - Arens, Winfried
AU - Bosch, Salvador
AU - Duparre, Angela
AU - Masetti, Enrico
AU - Jacob, Damien
AU - Kiriakidis, George
AU - Peiro, Francesca
AU - Quesnel, Etienne
AU - Tikhonravov, Alexander
PY - 1999/9/7
Y1 - 1999/9/7
N2 - In high quality optical coating systems for the DUV-spectral range, MgF2 is one of the preferred deposition materials. MgF2-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF2 is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF2 were deposited on superpolished fused silica and CaF2-substrates by ion beam sputtering (IBS, [2]), boat (bPVD) and e-beam (ePVD) evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques involving conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The optical constants of the MgF2-layers, which were determined by two independent data reduction algorithms from the spectral behaviour, are in good agreement with values published in the open literature: The refractive indices range between 1.40 and 1.41 at 248 nm for the PVD and IBS processes. The IBS-process achieves best homogeneity and lowest surface roughness around 1nmrms among the processes compared. In contrast to PVD coatings, which exhibit tensile mechanical stress ranging approximately from 300 to 400 MPa, high compressive stress of up to 910 MPa occurs in the IBS- coatings. The experimental findings are discussed in respect to the microstructural properties and the surface topography of the coatings.
AB - In high quality optical coating systems for the DUV-spectral range, MgF2 is one of the preferred deposition materials. MgF2-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF2 is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF2 were deposited on superpolished fused silica and CaF2-substrates by ion beam sputtering (IBS, [2]), boat (bPVD) and e-beam (ePVD) evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques involving conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The optical constants of the MgF2-layers, which were determined by two independent data reduction algorithms from the spectral behaviour, are in good agreement with values published in the open literature: The refractive indices range between 1.40 and 1.41 at 248 nm for the PVD and IBS processes. The IBS-process achieves best homogeneity and lowest surface roughness around 1nmrms among the processes compared. In contrast to PVD coatings, which exhibit tensile mechanical stress ranging approximately from 300 to 400 MPa, high compressive stress of up to 910 MPa occurs in the IBS- coatings. The experimental findings are discussed in respect to the microstructural properties and the surface topography of the coatings.
UR - http://www.scopus.com/inward/record.url?scp=0032664670&partnerID=8YFLogxK
U2 - 10.1117/12.360111
DO - 10.1117/12.360111
M3 - Conference contribution
AN - SCOPUS:0032664670
SN - 0-8194-3212-1
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 436
EP - 445
BT - Advances in Optical Interference Coatings
PB - SPIE
CY - Bellingham
T2 - 1999 Advances in Optical Interference Coatings
Y2 - 25 May 1999 through 27 May 1999
ER -