Unveiling the 3D Morphology of Epitaxial GaAs/AlGaAs Quantum Dots

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OriginalspracheEnglisch
Seitenumfang8
FachzeitschriftNano letters
Frühes Online-Datum25 Juli 2024
PublikationsstatusElektronisch veröffentlicht (E-Pub) - 25 Juli 2024

Abstract

Strain-free GaAs/AlGaAs semiconductor quantum dots (QDs) grown by droplet etching and nanohole infilling (DENI) are highly promising candidates for the on-demand generation of indistinguishable and entangled photon sources. The spectroscopic fingerprint and quantum optical properties of QDs are significantly influenced by their morphology. The effects of nanohole geometry and infilled material on the exciton binding energies and fine structure splitting are well-understood. However, a comprehensive understanding of GaAs/AlGaAs QD morphology remains elusive. To address this, we employ high-resolution scanning transmission electron microscopy (STEM) and reverse engineering through selective chemical etching and atomic force microscopy (AFM). Cross-sectional STEM of uncapped QDs reveals an inverted conical nanohole with Al-rich sidewalls and defect-free interfaces. Subsequent selective chemical etching and AFM measurements further reveal asymmetries in element distribution. This study enhances the understanding of DENI QD morphology and provides a fundamental three-dimensional structural model for simulating and optimizing their optoelectronic properties.

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Unveiling the 3D Morphology of Epitaxial GaAs/AlGaAs Quantum Dots. / Zhang, Yiteng; Grünewald, Lukas; Cao, Xin et al.
in: Nano letters, 25.07.2024.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Zhang, Y., Grünewald, L., Cao, X., Abdelbarey, D., Zheng, X., Rugeramigabo, E. P., Verbeeck, J., Zopf, M., & Ding, F. (2024). Unveiling the 3D Morphology of Epitaxial GaAs/AlGaAs Quantum Dots. Nano letters. Vorabveröffentlichung online. https://doi.org/10.48550/arXiv.2405.16073, https://doi.org/10.1021/acs.nanolett.4c02182
Zhang Y, Grünewald L, Cao X, Abdelbarey D, Zheng X, Rugeramigabo EP et al. Unveiling the 3D Morphology of Epitaxial GaAs/AlGaAs Quantum Dots. Nano letters. 2024 Jul 25. Epub 2024 Jul 25. doi: 10.48550/arXiv.2405.16073, 10.1021/acs.nanolett.4c02182
Zhang, Yiteng ; Grünewald, Lukas ; Cao, Xin et al. / Unveiling the 3D Morphology of Epitaxial GaAs/AlGaAs Quantum Dots. in: Nano letters. 2024.
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abstract = "Strain-free GaAs/AlGaAs semiconductor quantum dots (QDs) grown by droplet etching and nanohole infilling (DENI) are highly promising candidates for the on-demand generation of indistinguishable and entangled photon sources. The spectroscopic fingerprint and quantum optical properties of QDs are significantly influenced by their morphology. The effects of nanohole geometry and infilled material on the exciton binding energies and fine structure splitting are well-understood. However, a comprehensive understanding of GaAs/AlGaAs QD morphology remains elusive. To address this, we employ high-resolution scanning transmission electron microscopy (STEM) and reverse engineering through selective chemical etching and atomic force microscopy (AFM). Cross-sectional STEM of uncapped QDs reveals an inverted conical nanohole with Al-rich sidewalls and defect-free interfaces. Subsequent selective chemical etching and AFM measurements further reveal asymmetries in element distribution. This study enhances the understanding of DENI QD morphology and provides a fundamental three-dimensional structural model for simulating and optimizing their optoelectronic properties.",
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T1 - Unveiling the 3D Morphology of Epitaxial GaAs/AlGaAs Quantum Dots

AU - Zhang, Yiteng

AU - Grünewald, Lukas

AU - Cao, Xin

AU - Abdelbarey, Doaa

AU - Zheng, Xian

AU - Rugeramigabo, Eddy Patrick

AU - Verbeeck, Johan

AU - Zopf, Michael

AU - Ding, Fei

N1 - Publisher Copyright: © 2024 The Authors. Published by American Chemical Society.

PY - 2024/7/25

Y1 - 2024/7/25

N2 - Strain-free GaAs/AlGaAs semiconductor quantum dots (QDs) grown by droplet etching and nanohole infilling (DENI) are highly promising candidates for the on-demand generation of indistinguishable and entangled photon sources. The spectroscopic fingerprint and quantum optical properties of QDs are significantly influenced by their morphology. The effects of nanohole geometry and infilled material on the exciton binding energies and fine structure splitting are well-understood. However, a comprehensive understanding of GaAs/AlGaAs QD morphology remains elusive. To address this, we employ high-resolution scanning transmission electron microscopy (STEM) and reverse engineering through selective chemical etching and atomic force microscopy (AFM). Cross-sectional STEM of uncapped QDs reveals an inverted conical nanohole with Al-rich sidewalls and defect-free interfaces. Subsequent selective chemical etching and AFM measurements further reveal asymmetries in element distribution. This study enhances the understanding of DENI QD morphology and provides a fundamental three-dimensional structural model for simulating and optimizing their optoelectronic properties.

AB - Strain-free GaAs/AlGaAs semiconductor quantum dots (QDs) grown by droplet etching and nanohole infilling (DENI) are highly promising candidates for the on-demand generation of indistinguishable and entangled photon sources. The spectroscopic fingerprint and quantum optical properties of QDs are significantly influenced by their morphology. The effects of nanohole geometry and infilled material on the exciton binding energies and fine structure splitting are well-understood. However, a comprehensive understanding of GaAs/AlGaAs QD morphology remains elusive. To address this, we employ high-resolution scanning transmission electron microscopy (STEM) and reverse engineering through selective chemical etching and atomic force microscopy (AFM). Cross-sectional STEM of uncapped QDs reveals an inverted conical nanohole with Al-rich sidewalls and defect-free interfaces. Subsequent selective chemical etching and AFM measurements further reveal asymmetries in element distribution. This study enhances the understanding of DENI QD morphology and provides a fundamental three-dimensional structural model for simulating and optimizing their optoelectronic properties.

KW - 3D morphology

KW - AFM

KW - GaAs/AlGaAs

KW - HAADF-STEM

KW - selective chemical etching

KW - semiconductor quantum dots

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JF - Nano letters

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