Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 311-315 |
| Seitenumfang | 5 |
| Fachzeitschrift | Journal of Laser Micro Nanoengineering |
| Jahrgang | 7 |
| Ausgabenummer | 3 |
| Publikationsstatus | Veröffentlicht - Nov. 2012 |
| Extern publiziert | Ja |
Abstract
A femtosecond laser patterning process of thin film sensors on component surfaces is reported. This method is particularly useful for patterning of strain sensors which are sputter deposited direct-ly on curved surfaces. The ablation behavior of NiCr film irradiated by femtosecond laser pulses at non-normal angles of incidence is modeled and experimentally verified with linear and circular beam polarization for incidence angles up to 80° It is shown that the ablation threshold behavior can be described when including polarization and angle dependent Fresnel reflection into the laser ablation model. The laser process is finally demonstrated by patterning NiCr thin film sensors on a non-planar surface of a mechanical component for a machine tool.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Instrumentierung
- Ingenieurwesen (insg.)
- Wirtschaftsingenieurwesen und Fertigungstechnik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Journal of Laser Micro Nanoengineering, Jahrgang 7, Nr. 3, 11.2012, S. 311-315.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Ultrafast laser patterning of thin films on 3-D shaped surfaces for strain sensor applications
AU - Duesing, Jan Friedrich
AU - Suttmann, Oliver
AU - Koch, Jürgen
AU - Stute, Uwe
AU - Overmeyer, Ludger
PY - 2012/11
Y1 - 2012/11
N2 - A femtosecond laser patterning process of thin film sensors on component surfaces is reported. This method is particularly useful for patterning of strain sensors which are sputter deposited direct-ly on curved surfaces. The ablation behavior of NiCr film irradiated by femtosecond laser pulses at non-normal angles of incidence is modeled and experimentally verified with linear and circular beam polarization for incidence angles up to 80° It is shown that the ablation threshold behavior can be described when including polarization and angle dependent Fresnel reflection into the laser ablation model. The laser process is finally demonstrated by patterning NiCr thin film sensors on a non-planar surface of a mechanical component for a machine tool.
AB - A femtosecond laser patterning process of thin film sensors on component surfaces is reported. This method is particularly useful for patterning of strain sensors which are sputter deposited direct-ly on curved surfaces. The ablation behavior of NiCr film irradiated by femtosecond laser pulses at non-normal angles of incidence is modeled and experimentally verified with linear and circular beam polarization for incidence angles up to 80° It is shown that the ablation threshold behavior can be described when including polarization and angle dependent Fresnel reflection into the laser ablation model. The laser process is finally demonstrated by patterning NiCr thin film sensors on a non-planar surface of a mechanical component for a machine tool.
KW - Ablation threshold
KW - Femtosecond laser pulses
KW - Incident angle
KW - Nicr
KW - Polar-ization
KW - Surface strain sensor
KW - Thin film processing
UR - http://www.scopus.com/inward/record.url?scp=84869740827&partnerID=8YFLogxK
U2 - 10.2961/jlmn.2012.03.0014
DO - 10.2961/jlmn.2012.03.0014
M3 - Article
AN - SCOPUS:84869740827
VL - 7
SP - 311
EP - 315
JO - Journal of Laser Micro Nanoengineering
JF - Journal of Laser Micro Nanoengineering
SN - 1880-0688
IS - 3
ER -