TY - JOUR

T1 - Towards a Highly Sensitive Piezoelectric Nano-Mass Detection

T2 - A Model-Based Concept Study

AU - Twiefel, Jens

AU - Glukhovskoy, Anatoly

AU - de Wall, Sascha

AU - Wurz, Marc Christopher

AU - Sehlmeyer, Merle

AU - Hitzemann, Moritz

AU - Zimmermann, Stefan

N1 - Funding Information: The publication of this article was funded by the Open Access fund of Leibniz Universität Hannover.

PY - 2021/4/4

Y1 - 2021/4/4

N2 - The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.

AB - The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.

KW - Co-resonance

KW - Inertial balance

KW - N/MEMS

KW - Nano-mass detection

KW - Nano/micro-electro-mechanical-system

KW - Piezoelectric sensors

KW - Resonance systems

UR - http://www.scopus.com/inward/record.url?scp=85103486789&partnerID=8YFLogxK

U2 - 10.3390/s21072533

DO - 10.3390/s21072533

M3 - Article

C2 - 33916616

AN - SCOPUS:85103486789

VL - 21

JO - Sensors

JF - Sensors

SN - 1424-8220

IS - 7

M1 - 2533

ER -