Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 9640-9648 |
| Seitenumfang | 9 |
| Fachzeitschrift | Optics Express |
| Jahrgang | 23 |
| Ausgabenummer | 8 |
| Publikationsstatus | Veröffentlicht - 2015 |
Abstract
Optical aberrations of microscope lenses are known as a source of systematic errors in confocal surface metrology, which has become one of the most popular methods to measure the surface topography of microstructures. We demonstrate that these errors are not constant over the entire field of view but also depend on the local slope angle of the microstructure and lead to significant deviations between the measured and the actual surface. It is shown by means of a full vectorial high NA numerical model that a change in the slope angle alters the shape of the intensity depth response of the microscope and leads to a shift of the intensity peak of up to several hundred nanometers. Comparative experimental data are presented which support the theoretical results. Our studies allow for correction of optical aberrations and, thus, increase the accuracy in profilometric measurements.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
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in: Optics Express, Jahrgang 23, Nr. 8, 2015, S. 9640-9648.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Systematic errors on curved microstructures caused by aberrations in confocal surface metrology
AU - Rahlves, Maik
AU - Roth, Bernhard
AU - Reithmeier, Eduard
PY - 2015
Y1 - 2015
N2 - Optical aberrations of microscope lenses are known as a source of systematic errors in confocal surface metrology, which has become one of the most popular methods to measure the surface topography of microstructures. We demonstrate that these errors are not constant over the entire field of view but also depend on the local slope angle of the microstructure and lead to significant deviations between the measured and the actual surface. It is shown by means of a full vectorial high NA numerical model that a change in the slope angle alters the shape of the intensity depth response of the microscope and leads to a shift of the intensity peak of up to several hundred nanometers. Comparative experimental data are presented which support the theoretical results. Our studies allow for correction of optical aberrations and, thus, increase the accuracy in profilometric measurements.
AB - Optical aberrations of microscope lenses are known as a source of systematic errors in confocal surface metrology, which has become one of the most popular methods to measure the surface topography of microstructures. We demonstrate that these errors are not constant over the entire field of view but also depend on the local slope angle of the microstructure and lead to significant deviations between the measured and the actual surface. It is shown by means of a full vectorial high NA numerical model that a change in the slope angle alters the shape of the intensity depth response of the microscope and leads to a shift of the intensity peak of up to several hundred nanometers. Comparative experimental data are presented which support the theoretical results. Our studies allow for correction of optical aberrations and, thus, increase the accuracy in profilometric measurements.
UR - http://www.scopus.com/inward/record.url?scp=84948686539&partnerID=8YFLogxK
U2 - 10.1364/OE.23.009640
DO - 10.1364/OE.23.009640
M3 - Article
AN - SCOPUS:84948686539
VL - 23
SP - 9640
EP - 9648
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 8
ER -