Surface passivation of high-efficiency silicon solar cells by atomic-layer-deposited Al2O3

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Autoren

  • J. Schmidt
  • A. Merkle
  • R. Brendel
  • B. Hoex
  • M. C.M. Van De Sanden
  • W. M.M. Kessels

Externe Organisationen

  • Institut für Solarenergieforschung GmbH (ISFH)
  • Eindhoven University of Technology (TU/e)
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Details

OriginalspracheEnglisch
Seiten (von - bis)461-466
Seitenumfang6
FachzeitschriftProgress in Photovoltaics: Research and Applications
Jahrgang16
Ausgabenummer6
Frühes Online-Datum3 März 2008
PublikationsstatusVeröffentlicht - Sept. 2008
Extern publiziertJa

Abstract

Atomic-layer-deposited aluminium oxide (Al2O3) is applied as rear-surface-passivating dielectric layer to passivated emitter and rear cell (PERC)-type crystalline silicon (c-Si) solar cells. The excellent passivation of low-resistivity p-type silicon by the negative-charge-dielectric Al2O3 is confirmed on the device level by an independently confirmed energy conversion efficiency of 20 6%. The best results are obtained for a stack consisting of a 30 nm Al2O3 film covered by a 200 nm plasma-enhanced-chemical-vapour-deposited silicon oxide (SiOx) layer, resulting in a rear surface recombination velocity (SRV) of 70cm/s. Comparable results are obtained for a 130 nm single-layer of Al 2O3, resulting in a rear SRV of 90 cm/s.

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Zitieren

Surface passivation of high-efficiency silicon solar cells by atomic-layer-deposited Al2O3. / Schmidt, J.; Merkle, A.; Brendel, R. et al.
in: Progress in Photovoltaics: Research and Applications, Jahrgang 16, Nr. 6, 09.2008, S. 461-466.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Schmidt J, Merkle A, Brendel R, Hoex B, Van De Sanden MCM, Kessels WMM. Surface passivation of high-efficiency silicon solar cells by atomic-layer-deposited Al2O3. Progress in Photovoltaics: Research and Applications. 2008 Sep;16(6):461-466. Epub 2008 Mär 3. doi: 10.1002/pip.823
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abstract = "Atomic-layer-deposited aluminium oxide (Al2O3) is applied as rear-surface-passivating dielectric layer to passivated emitter and rear cell (PERC)-type crystalline silicon (c-Si) solar cells. The excellent passivation of low-resistivity p-type silicon by the negative-charge-dielectric Al2O3 is confirmed on the device level by an independently confirmed energy conversion efficiency of 20 6%. The best results are obtained for a stack consisting of a 30 nm Al2O3 film covered by a 200 nm plasma-enhanced-chemical-vapour-deposited silicon oxide (SiOx) layer, resulting in a rear surface recombination velocity (SRV) of 70cm/s. Comparable results are obtained for a 130 nm single-layer of Al 2O3, resulting in a rear SRV of 90 cm/s.",
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AU - Schmidt, J.

AU - Merkle, A.

AU - Brendel, R.

AU - Hoex, B.

AU - Van De Sanden, M. C.M.

AU - Kessels, W. M.M.

N1 - Funding Information: We gratefullyacknowledge the financial support provided by theGerman State of Lower Saxony and the NetherlandsTechnology Foundation STW.

PY - 2008/9

Y1 - 2008/9

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AB - Atomic-layer-deposited aluminium oxide (Al2O3) is applied as rear-surface-passivating dielectric layer to passivated emitter and rear cell (PERC)-type crystalline silicon (c-Si) solar cells. The excellent passivation of low-resistivity p-type silicon by the negative-charge-dielectric Al2O3 is confirmed on the device level by an independently confirmed energy conversion efficiency of 20 6%. The best results are obtained for a stack consisting of a 30 nm Al2O3 film covered by a 200 nm plasma-enhanced-chemical-vapour-deposited silicon oxide (SiOx) layer, resulting in a rear surface recombination velocity (SRV) of 70cm/s. Comparable results are obtained for a 130 nm single-layer of Al 2O3, resulting in a rear SRV of 90 cm/s.

KW - Aluminium oxide

KW - Crystalline silicon solar cells

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