Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 6711-6715 |
| Seitenumfang | 5 |
| Fachzeitschrift | Journal of applied physics |
| Jahrgang | 80 |
| Ausgabenummer | 12 |
| Publikationsstatus | Veröffentlicht - 15 Dez. 1996 |
| Extern publiziert | Ja |
Abstract
Molecular beam epitaxial growth of Si1-yCy alloys pseudomorphically strained on the (2 × 1) reconstructed Si(001) has been investigated as a function of growth conditions. An important question concerns the relation between substitutional and interstitial carbon incorporation, which has a large impact on electrical and optical properties of these layers. We show that the interstitial-to-substitutional carbon ratio is strongly influenced by the growth conditions, such as growth temperature and Si growth rate. Both reduction in growth temperature and increase of the overall growth rate lead to an increase in the substitutional-to-interstitial carbon ratio. However, these changes in growth conditions can also cause some deterioration in crystal quality. The carbon incorporation behavior is well described by first order kinetics.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Allgemeine Physik und Astronomie
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in: Journal of applied physics, Jahrgang 80, Nr. 12, 15.12.1996, S. 6711-6715.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Substitutional versus interstitial carbon incorporation during pseudomorphic growth of Si1-yCy on Si(001)
AU - Osten, H. J.
AU - Kim, Myeongcheol
AU - Pressel, K.
AU - Zaumseil, P.
PY - 1996/12/15
Y1 - 1996/12/15
N2 - Molecular beam epitaxial growth of Si1-yCy alloys pseudomorphically strained on the (2 × 1) reconstructed Si(001) has been investigated as a function of growth conditions. An important question concerns the relation between substitutional and interstitial carbon incorporation, which has a large impact on electrical and optical properties of these layers. We show that the interstitial-to-substitutional carbon ratio is strongly influenced by the growth conditions, such as growth temperature and Si growth rate. Both reduction in growth temperature and increase of the overall growth rate lead to an increase in the substitutional-to-interstitial carbon ratio. However, these changes in growth conditions can also cause some deterioration in crystal quality. The carbon incorporation behavior is well described by first order kinetics.
AB - Molecular beam epitaxial growth of Si1-yCy alloys pseudomorphically strained on the (2 × 1) reconstructed Si(001) has been investigated as a function of growth conditions. An important question concerns the relation between substitutional and interstitial carbon incorporation, which has a large impact on electrical and optical properties of these layers. We show that the interstitial-to-substitutional carbon ratio is strongly influenced by the growth conditions, such as growth temperature and Si growth rate. Both reduction in growth temperature and increase of the overall growth rate lead to an increase in the substitutional-to-interstitial carbon ratio. However, these changes in growth conditions can also cause some deterioration in crystal quality. The carbon incorporation behavior is well described by first order kinetics.
UR - http://www.scopus.com/inward/record.url?scp=0001552493&partnerID=8YFLogxK
U2 - 10.1063/1.363797
DO - 10.1063/1.363797
M3 - Article
AN - SCOPUS:0001552493
VL - 80
SP - 6711
EP - 6715
JO - Journal of applied physics
JF - Journal of applied physics
SN - 0021-8979
IS - 12
ER -