TY - GEN

T1 - Structuring methods of polymers for low cost sensor manufacturing

AU - Bengsch, Sebastian

AU - Wurz, Marc Christopher

AU - Aue, Maximilian

AU - De Wall, Sascha

N1 - Funding Information: ACKNOWLEDGMENT I would like to thank the Institute of Micro Production Technology as well as the Leibniz University Hannover for the opportunity and the equipment to develop this manufacturing technique for low cost sensor production. Further thanks goes out to my co-author and supervisor Dr.-Ing. M.C. Wurz for the excellent supervision regarding this project as well as the support from Maximilian Aue, Sascha de Wall, and especially Jürgen Becker. Publisher Copyright: © 2018 IEEE. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.

PY - 2018/8/7

Y1 - 2018/8/7

N2 - A new manufacturing technique for low cost sensor production was developed at the Institute of Micro Production Technology at the Leibniz University Hanover. The herein described manufacturing technique uses common injection molding processes to pre-structure thermoplastic polymers such as Polycarbonate, which can subsequently be used as a substrate to build up sensor structures. The sensor structures are generated by sputter deposition and a following chemical mechanical polishing step. The realized sensor structure can be manufactured neglecting any lithography processes and therefore eliminates expensive clean room technology. This work investigates and optimizes injection molding parameter using design of experiment methods. Following the parameter studies, a manufacturing process designed to realize a micro technologically fabricated injection mold inlay was performed, and the performance of an electroplated Ni based injection mold master form for sensor structure manufacturing evaluated. A temperature sensor on a thermoplastic substrate (polycarbonate) prototype was realized, which was able to prove the feasibility of the manufacturing technique and the robustness of polymers as a substrate material.

AB - A new manufacturing technique for low cost sensor production was developed at the Institute of Micro Production Technology at the Leibniz University Hanover. The herein described manufacturing technique uses common injection molding processes to pre-structure thermoplastic polymers such as Polycarbonate, which can subsequently be used as a substrate to build up sensor structures. The sensor structures are generated by sputter deposition and a following chemical mechanical polishing step. The realized sensor structure can be manufactured neglecting any lithography processes and therefore eliminates expensive clean room technology. This work investigates and optimizes injection molding parameter using design of experiment methods. Following the parameter studies, a manufacturing process designed to realize a micro technologically fabricated injection mold inlay was performed, and the performance of an electroplated Ni based injection mold master form for sensor structure manufacturing evaluated. A temperature sensor on a thermoplastic substrate (polycarbonate) prototype was realized, which was able to prove the feasibility of the manufacturing technique and the robustness of polymers as a substrate material.

KW - Injection molding

KW - Manufacturing technology

KW - Polymer substrate

KW - Pt sensor

UR - http://www.scopus.com/inward/record.url?scp=85051993748&partnerID=8YFLogxK

U2 - 10.1109/ECTC.2018.00213

DO - 10.1109/ECTC.2018.00213

M3 - Conference contribution

AN - SCOPUS:85051993748

SN - 9781538649985

T3 - Proceedings - Electronic Components and Technology Conference

SP - 1396

EP - 1401

BT - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 68th IEEE Electronic Components and Technology Conference, ECTC 2018

Y2 - 29 May 2018 through 1 June 2018

ER -