Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Optical Interference Coatings |
| Untertitel | OIC 2007 |
| Herausgeber (Verlag) | OSA - The Optical Society |
| ISBN (Print) | 1557528411, 9781557528414 |
| Publikationsstatus | Veröffentlicht - 2007 |
| Extern publiziert | Ja |
| Veranstaltung | Optical Interference Coatings, OIC 2007 - Tucson, AZ, USA / Vereinigte Staaten Dauer: 3 Juni 2007 → 3 Juni 2007 |
Publikationsreihe
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (elektronisch) | 2162-2701 |
Abstract
Fluoride materials deposited with conventional thermal evaporation techniques show a high tensile stress. The effect of stress compensation by inserting compressive silicon oxide layers into the tensile fluoride stack is investigated.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Instrumentierung
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
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Optical Interference Coatings: OIC 2007. OSA - The Optical Society, 2007. (Optics InfoBase Conference Papers).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Stress compensation in fluoride coatings for the VUV spectral range
AU - Günster, Stefan
AU - Dieckmann, Manfred
AU - Ehlers, Henrik
AU - Ristau, Detlev
PY - 2007
Y1 - 2007
N2 - Fluoride materials deposited with conventional thermal evaporation techniques show a high tensile stress. The effect of stress compensation by inserting compressive silicon oxide layers into the tensile fluoride stack is investigated.
AB - Fluoride materials deposited with conventional thermal evaporation techniques show a high tensile stress. The effect of stress compensation by inserting compressive silicon oxide layers into the tensile fluoride stack is investigated.
UR - http://www.scopus.com/inward/record.url?scp=85087600188&partnerID=8YFLogxK
U2 - 10.1364/oic.2007.tub5
DO - 10.1364/oic.2007.tub5
M3 - Conference contribution
AN - SCOPUS:85087600188
SN - 1557528411
SN - 9781557528414
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2007
Y2 - 3 June 2007 through 3 June 2007
ER -