Strained state of Ge(Si) islands on Si: Finite element calculations and comparison to convergent beam electron-diffraction measurements

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Externe Organisationen

  • Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU Erlangen-Nürnberg)
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Details

OriginalspracheEnglisch
Seiten (von - bis)3617-3619
Seitenumfang3
FachzeitschriftApplied physics letters
Jahrgang64
Ausgabenummer26
PublikationsstatusVeröffentlicht - 1994
Extern publiziertJa

Abstract

In this letter we present calculations by three-dimensional finite element method and measurements by convergent beam electron diffraction of the displacement field resulting from misfitting Ge0.85Si0.25 islands on Si(001). A good agreement between the results of both methods indicates that the three-dimensional finite element method is a reliable tool to calculate the strain, and thus the stress field, in such nanostructures. As a result both methods show that the substrate substantially takes part in the elastic relaxation process in such heteroepitaxial systems.

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Strained state of Ge(Si) islands on Si: Finite element calculations and comparison to convergent beam electron-diffraction measurements. / Christiansen, S.; Albrecht, M.; Strunk, H. P. et al.
in: Applied physics letters, Jahrgang 64, Nr. 26, 1994, S. 3617-3619.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Christiansen, S. ; Albrecht, M. ; Strunk, H. P. et al. / Strained state of Ge(Si) islands on Si : Finite element calculations and comparison to convergent beam electron-diffraction measurements. in: Applied physics letters. 1994 ; Jahrgang 64, Nr. 26. S. 3617-3619.
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AU - Strunk, H. P.

AU - Maier, H. J.

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