Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Advances in Optical Thin Films III |
| Publikationsstatus | Veröffentlicht - 25 Sept. 2008 |
| Extern publiziert | Ja |
| Veranstaltung | Advances in Optical Thin Films III - Glasgow, Großbritannien / Vereinigtes Königreich Dauer: 2 Sept. 2008 → 3 Sept. 2008 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 7101 |
| ISSN (Print) | 0277-786X |
Abstract
The production of advanced optical coatings with complex spectral characteristics and high performance is directly dependent on the stability of the deposition process and on the accuracy of the monitoring system employed for controlling the thickness of the constituent single layers. The present contribution is concentrated on the current state in deposition control and manufacturing of coatings with improved precision. As major topics the simulation of deposition processes, modern monitoring concepts, and the handling of errors occurring during the deposition process will be discussed. For illustration of some recent developments, results on the deposition of rugate filters on the basis of an ion beam sputtering process will be presented.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Advances in Optical Thin Films III. 2008. 71010C (Proceedings of SPIE - The International Society for Optical Engineering; Band 7101).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - State of the art in deterministic production of optical thin films
AU - Ristau, Detlev
AU - Ehlers, Henrik
AU - Schlichting, S.
AU - Lappschies, Marc
PY - 2008/9/25
Y1 - 2008/9/25
N2 - The production of advanced optical coatings with complex spectral characteristics and high performance is directly dependent on the stability of the deposition process and on the accuracy of the monitoring system employed for controlling the thickness of the constituent single layers. The present contribution is concentrated on the current state in deposition control and manufacturing of coatings with improved precision. As major topics the simulation of deposition processes, modern monitoring concepts, and the handling of errors occurring during the deposition process will be discussed. For illustration of some recent developments, results on the deposition of rugate filters on the basis of an ion beam sputtering process will be presented.
AB - The production of advanced optical coatings with complex spectral characteristics and high performance is directly dependent on the stability of the deposition process and on the accuracy of the monitoring system employed for controlling the thickness of the constituent single layers. The present contribution is concentrated on the current state in deposition control and manufacturing of coatings with improved precision. As major topics the simulation of deposition processes, modern monitoring concepts, and the handling of errors occurring during the deposition process will be discussed. For illustration of some recent developments, results on the deposition of rugate filters on the basis of an ion beam sputtering process will be presented.
KW - Deterministic production
KW - In-situ monitoring
KW - Optical broad band monitoring
KW - Optical coating systems
UR - http://www.scopus.com/inward/record.url?scp=56349148877&partnerID=8YFLogxK
U2 - 10.1117/12.797264
DO - 10.1117/12.797264
M3 - Conference contribution
AN - SCOPUS:56349148877
SN - 9780819473318
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Optical Thin Films III
T2 - Advances in Optical Thin Films III
Y2 - 2 September 2008 through 3 September 2008
ER -