Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Advances in optical interference coatings |
| Untertitel | 25 - 27 May 1999, Berlin, Germany |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| Seiten | 529-538 |
| Seitenumfang | 10 |
| ISBN (Print) | 0-8194-3212-1 |
| Publikationsstatus | Veröffentlicht - 7 Sept. 1999 |
| Extern publiziert | Ja |
| Veranstaltung | 1999 Advances in Optical Interference Coatings - Berlin, Ger Dauer: 25 Mai 1999 → 27 Mai 1999 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 3738 |
| ISSN (Print) | 0277-786X |
Abstract
The deposition of gradient index coatings attaches a higher importance for science and also for industrial applications. Especially the progress in chemical vapour deposition technologies opens new opportunities for the production of various types of gradient index coatings. However, the characterization of these types of coatings plays a substantial role in the optimization of coating processes. The spectrophotometric characterization and analysis of gradient index layer coatings is described. SiOxNy gradient index coatings were produced in a CVD process, and gradient index TiO2 layers in an e-beam deposition process with varying ion bombardment. A set of transmission and reflection spectra for different angles of incidence and polarization states was measured. The subsequent data evaluation employs a multilayer model for the gradient index layer to calculate the corresponding spectra. The analysing procedure optimizes the layer system with respect to a minimum deviation between calculated and experimental data. Refractive index data and layer thickness are adapted. Results of gradient index layer systems, three layer coating systems, and homogeneous single layers are presented. The experimental spectra are presented in comparison to the corresponding spectra calculated from the evaluated coating design. The evaluated behaviour of the refractive indices in dependence of the film thickness is discussed in view of the original design for the production process. Also, the influence of measurement errors on the data extraction is demonstrated, as well as the effect of the starting parameters. A good agreement between the simulated and experimental data could be achieved for the gradient index layer system, which demonstrates the versatility of the characterization procedure.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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Advances in optical interference coatings: 25 - 27 May 1999, Berlin, Germany. Bellingham: SPIE, 1999. S. 529-538 (Proceedings of SPIE - The International Society for Optical Engineering; Band 3738).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Spectrophotometric characterization of gradient index coatings
AU - Günster, Stefan
AU - Dieckmann, Manfred
AU - Ristau, Detlev
AU - Le Bellac, David
PY - 1999/9/7
Y1 - 1999/9/7
N2 - The deposition of gradient index coatings attaches a higher importance for science and also for industrial applications. Especially the progress in chemical vapour deposition technologies opens new opportunities for the production of various types of gradient index coatings. However, the characterization of these types of coatings plays a substantial role in the optimization of coating processes. The spectrophotometric characterization and analysis of gradient index layer coatings is described. SiOxNy gradient index coatings were produced in a CVD process, and gradient index TiO2 layers in an e-beam deposition process with varying ion bombardment. A set of transmission and reflection spectra for different angles of incidence and polarization states was measured. The subsequent data evaluation employs a multilayer model for the gradient index layer to calculate the corresponding spectra. The analysing procedure optimizes the layer system with respect to a minimum deviation between calculated and experimental data. Refractive index data and layer thickness are adapted. Results of gradient index layer systems, three layer coating systems, and homogeneous single layers are presented. The experimental spectra are presented in comparison to the corresponding spectra calculated from the evaluated coating design. The evaluated behaviour of the refractive indices in dependence of the film thickness is discussed in view of the original design for the production process. Also, the influence of measurement errors on the data extraction is demonstrated, as well as the effect of the starting parameters. A good agreement between the simulated and experimental data could be achieved for the gradient index layer system, which demonstrates the versatility of the characterization procedure.
AB - The deposition of gradient index coatings attaches a higher importance for science and also for industrial applications. Especially the progress in chemical vapour deposition technologies opens new opportunities for the production of various types of gradient index coatings. However, the characterization of these types of coatings plays a substantial role in the optimization of coating processes. The spectrophotometric characterization and analysis of gradient index layer coatings is described. SiOxNy gradient index coatings were produced in a CVD process, and gradient index TiO2 layers in an e-beam deposition process with varying ion bombardment. A set of transmission and reflection spectra for different angles of incidence and polarization states was measured. The subsequent data evaluation employs a multilayer model for the gradient index layer to calculate the corresponding spectra. The analysing procedure optimizes the layer system with respect to a minimum deviation between calculated and experimental data. Refractive index data and layer thickness are adapted. Results of gradient index layer systems, three layer coating systems, and homogeneous single layers are presented. The experimental spectra are presented in comparison to the corresponding spectra calculated from the evaluated coating design. The evaluated behaviour of the refractive indices in dependence of the film thickness is discussed in view of the original design for the production process. Also, the influence of measurement errors on the data extraction is demonstrated, as well as the effect of the starting parameters. A good agreement between the simulated and experimental data could be achieved for the gradient index layer system, which demonstrates the versatility of the characterization procedure.
UR - http://www.scopus.com/inward/record.url?scp=0032685599&partnerID=8YFLogxK
U2 - 10.1117/12.360124
DO - 10.1117/12.360124
M3 - Conference contribution
AN - SCOPUS:0032685599
SN - 0-8194-3212-1
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 529
EP - 538
BT - Advances in optical interference coatings
PB - SPIE
CY - Bellingham
T2 - 1999 Advances in Optical Interference Coatings
Y2 - 25 May 1999 through 27 May 1999
ER -