Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | e16044 |
| Fachzeitschrift | Light: Science and Applications |
| Jahrgang | 5 |
| Publikationsstatus | Veröffentlicht - 12 Nov. 2015 |
Abstract
In the present state of the art, ion beam sputtering is used to produce low-loss dielectric optics. During the manufacturing of a dielectric layer stack, the deposition material must be changed, which requires rapid mechanical movement of vacuum components. These mechanical components can be regarded as a risk factor for contamination during the coating process, which limits the quality of high-end laser components. To minimize the particle contamination, we present a novel deposition concept that does not require movable components to change the coating material during the coating process. A magnetic field guiding technique has been developed, which enables the tuning of the refractive index in the layer structure by sputtering mixtures with varying compositions of two materials using a single-ion source. The versatility of this new concept is demonstrated for a high-reflection mirror.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
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in: Light: Science and Applications, Jahrgang 5, e16044, 12.11.2015.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process
AU - Malobabic, Sina
AU - Jupé, Marco
AU - Ristau, Detlev
N1 - Funding information: This work was supported by the Deutsche Forschungsgemeinschaft (DFG) within the framework of the Cluster of Excellence QUEST Project 201.
PY - 2015/11/12
Y1 - 2015/11/12
N2 - In the present state of the art, ion beam sputtering is used to produce low-loss dielectric optics. During the manufacturing of a dielectric layer stack, the deposition material must be changed, which requires rapid mechanical movement of vacuum components. These mechanical components can be regarded as a risk factor for contamination during the coating process, which limits the quality of high-end laser components. To minimize the particle contamination, we present a novel deposition concept that does not require movable components to change the coating material during the coating process. A magnetic field guiding technique has been developed, which enables the tuning of the refractive index in the layer structure by sputtering mixtures with varying compositions of two materials using a single-ion source. The versatility of this new concept is demonstrated for a high-reflection mirror.
AB - In the present state of the art, ion beam sputtering is used to produce low-loss dielectric optics. During the manufacturing of a dielectric layer stack, the deposition material must be changed, which requires rapid mechanical movement of vacuum components. These mechanical components can be regarded as a risk factor for contamination during the coating process, which limits the quality of high-end laser components. To minimize the particle contamination, we present a novel deposition concept that does not require movable components to change the coating material during the coating process. A magnetic field guiding technique has been developed, which enables the tuning of the refractive index in the layer structure by sputtering mixtures with varying compositions of two materials using a single-ion source. The versatility of this new concept is demonstrated for a high-reflection mirror.
KW - EM field separation
KW - ion beam sputtering
KW - plasma guiding
UR - http://www.scopus.com/inward/record.url?scp=84960914708&partnerID=8YFLogxK
U2 - 10.1038/lsa.2016.44
DO - 10.1038/lsa.2016.44
M3 - Article
AN - SCOPUS:84960914708
VL - 5
JO - Light: Science and Applications
JF - Light: Science and Applications
SN - 2047-7538
M1 - e16044
ER -