Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs

Kirsten Weide-Zaage; Verena Hein

doi:10.1109/ESIME.2005.1502827

Details

Originalsprache	Englisch
Titel des Sammelwerks	Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005
Seiten	353-358
Seitenumfang	6
Publikationsstatus	Veröffentlicht - 2005
Veranstaltung	6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005 - Berlin, Deutschland Dauer: 18 Apr. 2005 → 20 Apr. 2005

Publikationsreihe

Name	Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005
Band	2005

ASJC Scopus Sachgebiete

Ingenieurwesen (insg.)

Zitieren

Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. / Weide-Zaage, Kirsten; Hein, Verena.
Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005. 2005. S. 353-358 1502827 (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005; Band 2005).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review

Weide-Zaage, K & Hein, V 2005, Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. in Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005., 1502827, Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005, Bd. 2005, S. 353-358, 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005, Berlin, Deutschland, 18 Apr. 2005. https://doi.org/10.1109/ESIME.2005.1502827

Weide-Zaage, K., & Hein, V. (2005). Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. In Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005 (S. 353-358). Artikel 1502827 (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005; Band 2005). https://doi.org/10.1109/ESIME.2005.1502827

Weide-Zaage K, Hein V. Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. in Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005. 2005. S. 353-358. 1502827. (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005). doi: 10.1109/ESIME.2005.1502827

Weide-Zaage, Kirsten ; Hein, Verena. / Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs. Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005. 2005. S. 353-358 (Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005).

Download

@inproceedings{7b4fe5a4043340b891eca94cb5f4a0f6,

title = "Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs",

author = "Kirsten Weide-Zaage and Verena Hein",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005 ; Conference date: 18-04-2005 Through 20-04-2005",

year = "2005",

doi = "10.1109/ESIME.2005.1502827",

language = "English",

isbn = "0780390628",

series = "Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005",

pages = "353--358",

booktitle = "Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005",

}

Download

TY - GEN

T1 - Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs

AU - Weide-Zaage, Kirsten

AU - Hein, Verena

PY - 2005

Y1 - 2005

UR - http://www.scopus.com/inward/record.url?scp=33745683883&partnerID=8YFLogxK

U2 - 10.1109/ESIME.2005.1502827

DO - 10.1109/ESIME.2005.1502827

M3 - Conference contribution

AN - SCOPUS:33745683883

SN - 0780390628

SN - 9780780390621

T3 - Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005

SP - 353

EP - 358

BT - Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005

T2 - 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005

Y2 - 18 April 2005 through 20 April 2005

ER -

Research@Leibniz University

Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs

Autoren

Organisationseinheiten

Externe Organisationen

Details

Publikationsreihe

ASJC Scopus Sachgebiete

Zitieren

Von denselben Autoren

Simulation of Thermal–Electrical and Mechanical Behavior of Conductive Yarns

Characterization of Soft Errors on a 28-nm SRAM-based FPGA under Neutron Radiation Exposure

Dna Digital-storage: Advantages, Approach and Technical Implementation

Simulation of Different SRAM Cells under Neutron Radiation with GEANT4

Technical Implementation of DNA Data-Storage