Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | 2017 30th International Vacuum Nanoelectronics Conference (IVNC) |
| Herausgeber/-innen | Christoph Langer, Robert Lawrowski |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers Inc. |
| Seiten | 132-133 |
| Seitenumfang | 2 |
| ISBN (elektronisch) | 9781509039753, 978-1-5090-3974-6 |
| ISBN (Print) | 978-1-5090-3976-0 |
| Publikationsstatus | Veröffentlicht - 2017 |
| Veranstaltung | 30th International Vacuum Nanoelectronics Conference - Regensburg, Deutschland Dauer: 10 Juli 2017 → 14 Juli 2017 Konferenznummer: 30 https://www.aconf.org/conf_92671.html |
Publikationsreihe
| Name | International Vacuum Nanoelectronics Conference |
|---|---|
| Herausgeber (Verlag) | IEEE |
| ISSN (elektronisch) | 2380-6311 |
Abstract
In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
2017 30th International Vacuum Nanoelectronics Conference (IVNC). Hrsg. / Christoph Langer; Robert Lawrowski. Institute of Electrical and Electronics Engineers Inc., 2017. S. 132-133 8051577 (International Vacuum Nanoelectronics Conference).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Silicon field emitter arrays produced via wafer dicing
AU - Kusch, Alexander
AU - Wurz, Marc
AU - Bunert, Erik
AU - Zimmermann, Stefan
N1 - Conference code: 30
PY - 2017
Y1 - 2017
N2 - In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
AB - In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
KW - chipping
KW - dicing
KW - emission
KW - field emitter
KW - silicon
UR - http://www.scopus.com/inward/record.url?scp=85032800817&partnerID=8YFLogxK
U2 - 10.1109/IVNC.2017.8051577
DO - 10.1109/IVNC.2017.8051577
M3 - Conference contribution
AN - SCOPUS:85032800817
SN - 978-1-5090-3976-0
T3 - International Vacuum Nanoelectronics Conference
SP - 132
EP - 133
BT - 2017 30th International Vacuum Nanoelectronics Conference (IVNC)
A2 - Langer, Christoph
A2 - Lawrowski, Robert
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th International Vacuum Nanoelectronics Conference
Y2 - 10 July 2017 through 14 July 2017
ER -