Details
Originalsprache | Englisch |
---|---|
Titel des Sammelwerks | Proceedings of the 25th International Conference on the Physics of Semiconductors Part I |
Seiten | 1743-1744 |
Band | 1 |
Publikationsstatus | Veröffentlicht - 2001 |
Veranstaltung | 25th International Conference on the Physics of Semiconductors - Osaka, Japan Dauer: 17 Sept. 2000 → 22 Sept. 2000 |
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Proceedings of the 25th International Conference on the Physics of Semiconductors Part I. Band 1 2001. S. 1743-1744.
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung
}
TY - GEN
T1 - Scanning probe nanolithography - Direct fabrication of mesoscopic devices
AU - Keyser, U. F.
AU - Schumacher, H. W.
AU - Zeitler, U.
AU - Haug, R. J.
AU - Eberl, K.
PY - 2001
Y1 - 2001
M3 - Conference contribution
SN - 978-3-540-41778-1
SN - 978-3-642-63993-7
VL - 1
SP - 1743
EP - 1744
BT - Proceedings of the 25th International Conference on the Physics of Semiconductors Part I
T2 - 25th International Conference on the Physics of Semiconductors
Y2 - 17 September 2000 through 22 September 2000
ER -