Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Advances in Optical Thin Films III |
| Publikationsstatus | Veröffentlicht - 25 Sept. 2008 |
| Extern publiziert | Ja |
| Veranstaltung | Advances in Optical Thin Films III - Glasgow, Großbritannien / Vereinigtes Königreich Dauer: 2 Sept. 2008 → 3 Sept. 2008 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 7101 |
| ISSN (Print) | 0277-786X |
Abstract
Interference filters for spectroscopic purposes or sensor applications are characterized by strictly specified spectral blocking and transmitting regions with intermediate steep edges. These steep edges must be positioned within nanometer accuracy while the coating may consist of more than one hundred non-quarterwave layers. Though modern ion assisted deposition processes in conjunction with quartz crystal control are well suited for the production of complex filters, an optical monitoring device seems to be necessary to fulfill the demanding spectral requirements. Broad band optical monitoring (BBM) directly on the calotte has been employed to control the production of this type of band stop filters. For a large number of also different types of these coatings the BBM-technique demonstrated its capability to improve the reliability and flexibility in industrial production. Within a stable well-characterized deposition process error self-compensation effects allow for a fast realization of various designs within specified tolerances. Nevertheless, optical broad band monitoring could not be applied to all types of these steep edge filters because error propagation leads to unreachable solutions of the thickness tracing algorithm for specific cases. The given examples of complex steep filters and the corresponding post analysis of stored online spectra as well as the simulation of the monitoring process reveal the influence of the design itself to this occurrence. A suggestion for an identification of critical thickness values within the layer sequence is discussed and solutions to the problems are presented.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Advances in Optical Thin Films III. 2008. 71010P (Proceedings of SPIE - The International Society for Optical Engineering; Band 7101).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Reliable production of steep edge interference filters
AU - Lappschies, Marc
AU - Pfeifer, Peter
AU - Schallenberg, Uwe
AU - Ehlers, Henrik
AU - Ristau, Detlev
PY - 2008/9/25
Y1 - 2008/9/25
N2 - Interference filters for spectroscopic purposes or sensor applications are characterized by strictly specified spectral blocking and transmitting regions with intermediate steep edges. These steep edges must be positioned within nanometer accuracy while the coating may consist of more than one hundred non-quarterwave layers. Though modern ion assisted deposition processes in conjunction with quartz crystal control are well suited for the production of complex filters, an optical monitoring device seems to be necessary to fulfill the demanding spectral requirements. Broad band optical monitoring (BBM) directly on the calotte has been employed to control the production of this type of band stop filters. For a large number of also different types of these coatings the BBM-technique demonstrated its capability to improve the reliability and flexibility in industrial production. Within a stable well-characterized deposition process error self-compensation effects allow for a fast realization of various designs within specified tolerances. Nevertheless, optical broad band monitoring could not be applied to all types of these steep edge filters because error propagation leads to unreachable solutions of the thickness tracing algorithm for specific cases. The given examples of complex steep filters and the corresponding post analysis of stored online spectra as well as the simulation of the monitoring process reveal the influence of the design itself to this occurrence. A suggestion for an identification of critical thickness values within the layer sequence is discussed and solutions to the problems are presented.
AB - Interference filters for spectroscopic purposes or sensor applications are characterized by strictly specified spectral blocking and transmitting regions with intermediate steep edges. These steep edges must be positioned within nanometer accuracy while the coating may consist of more than one hundred non-quarterwave layers. Though modern ion assisted deposition processes in conjunction with quartz crystal control are well suited for the production of complex filters, an optical monitoring device seems to be necessary to fulfill the demanding spectral requirements. Broad band optical monitoring (BBM) directly on the calotte has been employed to control the production of this type of band stop filters. For a large number of also different types of these coatings the BBM-technique demonstrated its capability to improve the reliability and flexibility in industrial production. Within a stable well-characterized deposition process error self-compensation effects allow for a fast realization of various designs within specified tolerances. Nevertheless, optical broad band monitoring could not be applied to all types of these steep edge filters because error propagation leads to unreachable solutions of the thickness tracing algorithm for specific cases. The given examples of complex steep filters and the corresponding post analysis of stored online spectra as well as the simulation of the monitoring process reveal the influence of the design itself to this occurrence. A suggestion for an identification of critical thickness values within the layer sequence is discussed and solutions to the problems are presented.
KW - Band stop filters
KW - Broadband optical monitoring
KW - Optical interference coatings
KW - Precision optics
UR - http://www.scopus.com/inward/record.url?scp=56249130100&partnerID=8YFLogxK
U2 - 10.1117/12.797459
DO - 10.1117/12.797459
M3 - Conference contribution
AN - SCOPUS:56249130100
SN - 9780819473318
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Optical Thin Films III
T2 - Advances in Optical Thin Films III
Y2 - 2 September 2008 through 3 September 2008
ER -