Reliable determination of wavelength dependence of thin film refractive index

Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review

Autoren

  • Alexander Tikhonravov
  • Michael Trubetskov
  • Tatiana Amotchkina
  • Andrei Tikhonravov
  • Detlev Ristau
  • Stefan Günster

Organisationseinheiten

Externe Organisationen

  • Research Computing Center
  • Laser Zentrum Hannover e.V. (LZH)
  • Lomonosov Moscow State University
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Titel des SammelwerksAdvanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Untertitel3 - 5 August 2003, San Diego, California, USA
ErscheinungsortBellingham
Herausgeber (Verlag)SPIE
Seiten331-342
Seitenumfang12
ISBN (Print)0-8194-5061-8
PublikationsstatusVeröffentlicht - 4 Nov. 2003
VeranstaltungAdvanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - San Diego, CA, USA / Vereinigte Staaten
Dauer: 3 Aug. 2003 → 5 Aug. 2003

Publikationsreihe

NameProceedings of SPIE - The International Society for Optical Engineering
Herausgeber (Verlag)SPIE
Band5188
ISSN (Print)0277-786X

Abstract

Depending on the choice of thin film models and measurement data used for the characterization analysis one can obtain essentially different characterization results. It is especially difficult to reliably determine refractive index wavelength dependencies in the case of low accuracy measurement data. We consider possible approaches aimed to improve a stability of refractive index determination. The ways of the verification of characterization results are also discussed. Practical examples used to illustrate the proposed approaches are connected with the most difficult case of the determination of the refractive indices of fluoride films in the VUV spectral region.

ASJC Scopus Sachgebiete

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Reliable determination of wavelength dependence of thin film refractive index. / Tikhonravov, Alexander; Trubetskov, Michael; Amotchkina, Tatiana et al.
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies: 3 - 5 August 2003, San Diego, California, USA. Bellingham: SPIE, 2003. S. 331-342 (Proceedings of SPIE - The International Society for Optical Engineering; Band 5188).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review

Tikhonravov, A, Trubetskov, M, Amotchkina, T, Tikhonravov, A, Ristau, D & Günster, S 2003, Reliable determination of wavelength dependence of thin film refractive index. in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies: 3 - 5 August 2003, San Diego, California, USA. Proceedings of SPIE - The International Society for Optical Engineering, Bd. 5188, SPIE, Bellingham, S. 331-342, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, San Diego, CA, USA / Vereinigte Staaten, 3 Aug. 2003. https://doi.org/10.1117/12.505554
Tikhonravov, A., Trubetskov, M., Amotchkina, T., Tikhonravov, A., Ristau, D., & Günster, S. (2003). Reliable determination of wavelength dependence of thin film refractive index. In Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies: 3 - 5 August 2003, San Diego, California, USA (S. 331-342). (Proceedings of SPIE - The International Society for Optical Engineering; Band 5188). SPIE. https://doi.org/10.1117/12.505554
Tikhonravov A, Trubetskov M, Amotchkina T, Tikhonravov A, Ristau D, Günster S. Reliable determination of wavelength dependence of thin film refractive index. in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies: 3 - 5 August 2003, San Diego, California, USA. Bellingham: SPIE. 2003. S. 331-342. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.505554
Tikhonravov, Alexander ; Trubetskov, Michael ; Amotchkina, Tatiana et al. / Reliable determination of wavelength dependence of thin film refractive index. Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies: 3 - 5 August 2003, San Diego, California, USA. Bellingham : SPIE, 2003. S. 331-342 (Proceedings of SPIE - The International Society for Optical Engineering).
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AU - Trubetskov, Michael

AU - Amotchkina, Tatiana

AU - Tikhonravov, Andrei

AU - Ristau, Detlev

AU - Günster, Stefan

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