Details
Originalsprache | Englisch |
---|---|
Titel des Sammelwerks | Optical Interference Coatings, OIC 2022 |
ISBN (elektronisch) | 9781957171043 |
Publikationsstatus | Veröffentlicht - 2022 |
Veranstaltung | Optical Interference Coatings, OIC 2022 - Vancouver, Kanada Dauer: 19 Juni 2022 → 24 Juni 2022 |
Publikationsreihe
Name | Optics InfoBase Conference Papers |
---|---|
ISSN (elektronisch) | 2162-2701 |
Abstract
The paper presents a concept for the reduction of nanoparticles in optical thin films using ion etching, to remove nanoparticles present on the substrate, and to reduce the effects of particles introduced during deposition.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Ingenieurwesen (insg.)
- Werkstoffmechanik
Zitieren
- Standard
- Harvard
- Apa
- Vancouver
- BibTex
- RIS
Optical Interference Coatings, OIC 2022. 2022. (Optics InfoBase Conference Papers).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Reduction of Nanoparticles in Optical Thin Films
AU - McCauley, Joshua
AU - Jupé, Marco
AU - Zhang, Jinlong
AU - Wienke, Andreas
AU - Ristau, Detlev
N1 - Funding Information: The authors would like to thank the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) for funding this work under Sino-German collaboration initiative under the project "Fast Coatings" (project number 448756425.).
PY - 2022
Y1 - 2022
N2 - The paper presents a concept for the reduction of nanoparticles in optical thin films using ion etching, to remove nanoparticles present on the substrate, and to reduce the effects of particles introduced during deposition.
AB - The paper presents a concept for the reduction of nanoparticles in optical thin films using ion etching, to remove nanoparticles present on the substrate, and to reduce the effects of particles introduced during deposition.
UR - http://www.scopus.com/inward/record.url?scp=85139100916&partnerID=8YFLogxK
U2 - 10.1364/OIC.2022.WC.5
DO - 10.1364/OIC.2022.WC.5
M3 - Conference contribution
AN - SCOPUS:85139100916
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings, OIC 2022
T2 - Optical Interference Coatings, OIC 2022
Y2 - 19 June 2022 through 24 June 2022
ER -