Details
Originalsprache | Englisch |
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Titel des Sammelwerks | Optical and infrared thin films |
Untertitel | 1 August 2000, San Diego, USA |
Erscheinungsort | Bellingham |
Herausgeber (Verlag) | SPIE |
Seiten | 83-92 |
Seitenumfang | 10 |
ISBN (Print) | 0-8194-3739-5 |
Publikationsstatus | Veröffentlicht - 19 Okt. 2000 |
Extern publiziert | Ja |
Veranstaltung | Optical and Infrared Thin Films - San diego, CA, USA Dauer: 1 Aug. 2000 → 1 Aug. 2000 |
Publikationsreihe
Name | Proceedings of SPIE - The International Society for Optical Engineering |
---|---|
Herausgeber (Verlag) | SPIE |
Band | 4094 |
ISSN (Print) | 0277-786X |
Abstract
In the course of the rapid development of laser technology and modern optics, an ever increasing demand for optical coatings with extraordinary specifications can be observed. In practice, the production of such high quality optics with special requirements in respect to bandwidth, edge steepness or wavelength accuracy regularly requires an extended optimization of the coating process. In many cases, the resulting high production cost delays the development of new promising concepts in laser and optics technology. For the realization of new optical designs, generally two difficulties occur: At first, the physical properties of the coating materials change after completion of the coating process due to environmental influences. Furthermore, the accuracy of the commonly utilized methods for thin film thickness monitoring is not sufficient for a reliable thickness control. In this paper, an ion beam sputtering (IBS) coating process is described for the completely automated fabrication of optical coatings with extremely stable characteristics. In contrast to conventional arrangements with witness glasses, the presented thickness monitoring during the coating process can be directly performed for the optics. The precise transmittance measurement over a bandwidth of one octave is achieved by a fiber-coupled multi-channel spectrophotometer. With this arrangement also very small layer thickness errors are detected and may be compensated by optimizing the subsequent layers in the stack in order to meet the specifications. The combination of the innovative IBS-process with the broad-band spectrophotometric thickness monitoring is the key for new laser applications, e.g. low loss edge filters for high power diode laser wavelength multiplexing or phase-optimized mirrors for ultrashort pulse laser systems.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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Optical and infrared thin films: 1 August 2000, San Diego, USA. Bellingham: SPIE, 2000. S. 83-92 (Proceedings of SPIE - The International Society for Optical Engineering; Band 4094).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Rapid prototyping of optical thin film filters
AU - Starke, Kai
AU - Gross, Tobias
AU - Lappschies, Marc
AU - Ristau, Detlev
PY - 2000/10/19
Y1 - 2000/10/19
N2 - In the course of the rapid development of laser technology and modern optics, an ever increasing demand for optical coatings with extraordinary specifications can be observed. In practice, the production of such high quality optics with special requirements in respect to bandwidth, edge steepness or wavelength accuracy regularly requires an extended optimization of the coating process. In many cases, the resulting high production cost delays the development of new promising concepts in laser and optics technology. For the realization of new optical designs, generally two difficulties occur: At first, the physical properties of the coating materials change after completion of the coating process due to environmental influences. Furthermore, the accuracy of the commonly utilized methods for thin film thickness monitoring is not sufficient for a reliable thickness control. In this paper, an ion beam sputtering (IBS) coating process is described for the completely automated fabrication of optical coatings with extremely stable characteristics. In contrast to conventional arrangements with witness glasses, the presented thickness monitoring during the coating process can be directly performed for the optics. The precise transmittance measurement over a bandwidth of one octave is achieved by a fiber-coupled multi-channel spectrophotometer. With this arrangement also very small layer thickness errors are detected and may be compensated by optimizing the subsequent layers in the stack in order to meet the specifications. The combination of the innovative IBS-process with the broad-band spectrophotometric thickness monitoring is the key for new laser applications, e.g. low loss edge filters for high power diode laser wavelength multiplexing or phase-optimized mirrors for ultrashort pulse laser systems.
AB - In the course of the rapid development of laser technology and modern optics, an ever increasing demand for optical coatings with extraordinary specifications can be observed. In practice, the production of such high quality optics with special requirements in respect to bandwidth, edge steepness or wavelength accuracy regularly requires an extended optimization of the coating process. In many cases, the resulting high production cost delays the development of new promising concepts in laser and optics technology. For the realization of new optical designs, generally two difficulties occur: At first, the physical properties of the coating materials change after completion of the coating process due to environmental influences. Furthermore, the accuracy of the commonly utilized methods for thin film thickness monitoring is not sufficient for a reliable thickness control. In this paper, an ion beam sputtering (IBS) coating process is described for the completely automated fabrication of optical coatings with extremely stable characteristics. In contrast to conventional arrangements with witness glasses, the presented thickness monitoring during the coating process can be directly performed for the optics. The precise transmittance measurement over a bandwidth of one octave is achieved by a fiber-coupled multi-channel spectrophotometer. With this arrangement also very small layer thickness errors are detected and may be compensated by optimizing the subsequent layers in the stack in order to meet the specifications. The combination of the innovative IBS-process with the broad-band spectrophotometric thickness monitoring is the key for new laser applications, e.g. low loss edge filters for high power diode laser wavelength multiplexing or phase-optimized mirrors for ultrashort pulse laser systems.
UR - http://www.scopus.com/inward/record.url?scp=0034542571&partnerID=8YFLogxK
U2 - 10.1117/12.404754
DO - 10.1117/12.404754
M3 - Conference contribution
AN - SCOPUS:0034542571
SN - 0-8194-3739-5
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 83
EP - 92
BT - Optical and infrared thin films
PB - SPIE
CY - Bellingham
T2 - Optical and Infrared Thin Films
Y2 - 1 August 2000 through 1 August 2000
ER -